Tunable metamaterial absorber based on phase-change materials
A phase change material and absorber technology, which can be used in instruments, nonlinear optics, optics, etc., to solve the problems of the difficulty of metamaterial absorbers and increase the structural complexity of metamaterial absorbers.
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Embodiment 1
[0021] First, a multilayer structure (metal layer 3-phase change material layer 4-metal layer 3-oxidation layer 5) 2 is formed on a glass substrate 1 by a material growth process, as shown in the attached figure 2 (a) shown.
[0022] Second, deposit SiO on the multilayer structure 2 2 film as a mask 6, as attached figure 2 (b) shown.
[0023] Then, the designed periodic hole matrix sample is transferred to the mask through the mask process, as shown in the attached figure 2 (c) shown. Among them, the structure design can adopt algorithms such as finite time domain difference method and finite element method.
[0024] Then, through an etching process, a periodic hole matrix 7 is prepared on the top metal layer 3, as shown in the attached figure 2 as shown in (d)
[0025] Finally, the mask 6 is removed to obtain a tunable metamaterial absorber 8, as shown in the attached figure 2 (e) shown.
Embodiment 2
[0027] First, a multilayer structure of N (N>=1) layers (metal layer 3-phase change material layer 4-metal layer 3-oxidation layer 5) 2 is formed on a glass substrate 1 by a material growth process, as shown in the attached image 3 (a) shown.
[0028] Second, deposit SiO on the multilayer structure 2 2 film as a mask 6, as attached image 3 (b) shown.
[0029] Then, the designed periodic hole matrix sample is transferred to the mask through the mask process, as shown in the attached image 3 (c) shown. Among them, the structure design can adopt algorithms such as finite time domain difference method and finite element method.
[0030] Then, through an etching process, a periodic hole matrix 7 is prepared on the top metal layer 3, as shown in the attached image 3 as shown in (d)
[0031] Finally, remove the mask 6, inject a phase change material 4 into the hole matrix 7 to seal the holes, and obtain a tunable metamaterial absorber 8, as shown in the attached image 3 (...
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