Magnification regulating method of projection optical system

Abstract

The invention provides a magnification regulating method of a projection optical system. The method comprises the following steps: firstly, providing a projection optical system, wherein the projection optical system comprises a front group, an aperture diaphragm and a rear group along the optical axis direction; the front group comprises a first glass group, a second glass group and a third glass group, wherein the first glass group and the third glass group have positive refractive powers, and the second glass group has negative refractive power; the rear group comprises a fourth glass group, a fifth glass group and a sixth glass group, wherein the fourth glass group and the sixth glass group have positive refractive power, and the firth glass group has negative refractive power; the front group and the rear group are in symmetry about the aperture diaphragm, and meanwhile, a group of lenses in symmetry in the third glass group and the fourth glass group are moved, and the projection magnification of the optical system can be regulated conveniently and effectively.

Description

technical field [0001] The invention relates to a method for adjusting the magnification of a projection optical system, in particular to a method for adjusting the magnification of a symmetrical double-telecentric projection optical system. Background technique [0002] With the development of projection lithography technology, the performance of the projection optical system is gradually improved, and the projection optical system can already be applied to various fields such as circuit manufacturing. In the actual production process of many circuit substrates, the substrates manufactured by different equipment will have slight differences in graphic size and magnification. At the same time, in various physical and chemical processing processes, the substrate will slightly expand or shrink. It will also lead to changes in the graphic size of the substrate, and the graphic size changes of different substrates are not the same, so in the manufacturing process of many substra...

AI Technical Summary

Problems solved by technology

[0003] However, in the prior art, such as U.S. Patent No. 6,879,383 (announcement date: April 12, 2005), the refractive reflection structure is adopted, the overall size is large, and the requirements for optical glass materials are very strict. The processing of large-diameter concave mirrors , the detection technical requirements are also very strict, and it is impossible to correct and adjust the projection magnification

Images