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Roll-to-roll continuous vacuum coating production machine

A vacuum coating and production machine technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of long production cycle, low efficiency, high energy consumption, etc., to expand production capacity and reduce costs , the effect of improving production efficiency

Inactive Publication Date: 2012-08-01
WEIHAI JINBO NEW ENERGY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Purpose of the invention: The present invention provides a roll-to-roll continuous vacuum coating production machine, the purpose of which is to solve the problems of long production cycle, large energy consumption, high cost and low efficiency of previous equipment

Method used

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specific Embodiment approach

[0013] detailed description: Below in conjunction with accompanying drawing, the present invention will be further described:

[0014] Such as figure 1 , the present invention provides a roll-to-roll continuous vacuum coating production machine, the production machine comprises a vacuum unwinding chamber 1, a production line main body 3 and a vacuum rewinding chamber 4, the vacuum unwinding chamber 1 is provided with an unwinding device, and the vacuum rewinding chamber There is a winding device in the chamber 4. The vacuum unwinding chamber 1 is connected to the main body 3 of the production line, and the main body 3 of the production line is connected to the vacuum winding chamber 4. Vacuum isolation valves 2 are provided between the 4. The main body 3 of the production line is also a vacuum process coating chamber.

[0015] The vacuum isolation valve 2 is connected with the vacuum system, the inflation system and the electric control system. .

[0016] The functions ...

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Abstract

The invention provides a roll-to-roll continuous vacuum coating production machine. The production machine is characterized by comprising a vacuum unrolling chamber, a production line main body and a vacuum rolling chamber, wherein the vacuum unrolling chamber is connected with the production line main body; the production line main body is connected with the vacuum rolling chamber; and a vacuum isolation valve is arranged between the vacuum unrolling chamber and the production line main body, and a vacuum isolation valve is arranged between the production line main body and the vacuum rolling chamber. The production machine well overcomes the defects of the prior art, greatly improves the production efficiency, enlarges the yield, reduces the cost, and is favorable for popularization and application.

Description

technical field [0001] The invention is used in the field of roll-to-roll vacuum equipment, and in particular relates to a roll-to-roll continuous vacuum coating production machine, which is suitable for roll-to-roll vacuum coating production of flexible substrates, and can improve equipment utilization and increase production capacity. Background technique [0002] Most of the existing roll-to-roll vacuum coating production lines (machines) are single-chamber divisions and multi-chamber structures. Although this kind of production equipment has a simple structure, low price, and good production efficiency and production capacity, it still has the following shortcomings. When Every time the coating equipment completes a coating production process, it is necessary to amplify the vacuum chamber of the entire vacuum equipment, break the vacuum, take out the coated substrate and load it into a new substrate roll to be coated. It takes a long time to restore the vacuum and consume...

Claims

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Application Information

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IPC IPC(8): C23C14/56C23C16/54
Inventor 张浙军
Owner WEIHAI JINBO NEW ENERGY TECH
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