Method and device for measuring optical system lateral magnification by utilizing uniform-speed moving point target

Abstract

The invention relates to a method and a device for measuring optical system lateral magnification by utilizing uniform-speed moving point target, belonging to the field of metering equipment taking an optical method as a characteristic. In the method, a points target is imaged under the uniform-speed motion state, so that a linear image is obtained; and in a frequency domain, a value range of pitch of pixels is found, and because the actual modification transfer function curve relative to a pixel pitch and a theoretical modification transfer function curve have the best contact ratio under the least square condition, and the optical system lateral magnification is calculated by a search algorithm to be obtained. In the device, a sliding block for bearing the point target is arranged on first rails and second rails, a controller controls the sliding block to do uniform-speed motion on the first rails, and at the same time, controls the sliding block to do motion on the second rails, and the motions in the two directions are matched, so that during the motion process, the point target is always focused to be imaged onto the surface of an image senor. By adopting the method and the device to measure the optical system lateral magnification rate, the errors between single-time measurement results can be reduced, and further, the repeatability of the measurement results can be improved.

Description

technical field [0001] The method and device for measuring the lateral magnification of an optical system using a uniform moving point target belongs to the field of metrology equipment characterized by the use of optical methods, and in particular relates to a point light source that moves in a straight line at a uniform speed as a target, and uses a constant moving image MTF in the frequency domain to measure A method and device for measuring the lateral magnification of an optical system. Background technique [0002] The lateral magnification of the optical system is a very important parameter in the field of medicine and precision measurement. It not only indicates the technical index of the optical system, but also can use this technical index to carry out precise measurement of other parameters. However, how to obtain the lateral magnification of an optical system is the primary problem in carrying out this work. [0003] 1. The measurement method of the lateral magn...

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Problems solved by technology

[0028] The present invention aims at the large distortion optical system of the above-mentioned existing measurement method, which is not suitable for measurement in a large field of view, but in a small field of view, there is the problem of low repeatability of lateral magnification measurement, and the existing measurement device has the problem of separation In view of the problem of focusing, a method and device for measuring the lateral magnification of an optical system is proposed. This method can improve the repeatability of measurement results in a small field of view and is more suitable for measuring the lateral magnification of a large distortion optical system; the device can eliminate defocus Influence on the measurement results, further improving the repeatability of the measurement results

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