Preparation method of bionic PDMS (Polydimethylsiloxane) curved compound eye
A curved compound eye, SU-8 technology, which is applied in the photoengraving process of pattern surface, photoengraving process coating equipment, optomechanical equipment, etc. problem, to achieve the effect of low cost, simple production and large volume
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[0040] A method for preparing a bionic PDMS curved surface compound eye, comprising the steps of:
[0041] (1), preparation of PDMS micro-convex lens mold 7:
[0042] Step 1: Take the first mask 2 whose shading part is several small circles 1 with a diameter of 100um, and several small circles 1 are evenly distributed within the large circle with a diameter of 1cm, wherein: the distance between adjacent small circles is 10um And the centers of three adjacent small circles are connected together to form an equilateral triangle;
[0043] Step 2: take the first circular substrate 3 with a diameter of 4 inches and carry out surface pretreatment at 180 0 Bake 30min on the C baking table and be down to room temperature again; Be coated with the AZ4620 photoresist that one deck thickness is 15um on the first circular substrate 3 and place on 80 0 Bake on the baking tray C for 90 minutes and then drop to room temperature; put the first circular substrate 3 and the first mask plate 2...
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