Elastic measuring head in three-dimensional micro-nano contact scanning probe

Abstract

The invention discloses an elastic measuring head in a three-dimensional micro-nano contact scanning probe. The elastic measuring head is characterized in that: a cross suspension piece is arranged in the center of a fixed circular ring; a cantilever spring plate is connected to the arm end of each cantilever in the cross suspension piece, and the other end of each cantilever spring plate is connected with the fixed circular ring to form a suspension structure of the cross suspension piece in the fixed circular ring; on a side plane, towards the inside of a cylinder body, of the cross suspension piece, a center plane reflective mirror is arranged in the center of the cross suspension piece, and a cantilever plane reflective mirror is arranged on the arm end part of at least one cantilever which is positioned at the cross suspension piece; and on a side plate, towards the outside of the cylinder body, of the cross suspension piece, a scanning probe is fixedly arranged in the center of the cross suspension piece, and a measuring ball positioned at the foremost end of the scanning probe is fixedly arranged on the end part of the scanning probe. The elastic measuring head disclosed by the invention can obtain detection effects with wide measuring range, high accuracy, high sensitivity and small measured force.

Description

technical field [0001] The invention relates to the field of micro-nano measurement, and more specifically relates to an elastic measuring head used in a high-precision and large-range three-dimensional micro-nano contact scanning probe used in a nano-coordinate measuring machine. Background technique [0002] With the development of micro-nano processing technology, micro-devices with sizes between millimeters and microns have come out one after another, such as micro-lenses, micro-gears, micro-chips, fuel injectors, etc.; the shape of micro-devices is becoming more and more complex, and the allowable dimensional tolerance Therefore, there is an urgent need for a three-coordinate measuring machine with nanometer-level measurement accuracy in practice. [0003] The nano three-dimensional coordinate measuring machine is mainly composed of two parts: a three-dimensional motion platform with nano-positioning measurement function and a probe with sensing function. There are two...

AI Technical Summary

Problems solved by technology

When the end of the measuring rod is subjected to external force, the silicon membrane is deformed, and the displacement and force of the end of the measuring head are detected through the change of piezoresistance on the silicon membrane. The probe adopts 24 piezoresistive detection methods to improve Improve the detection sensitivity and reduce the influence of the probe on the temperature, but the thin film structure makes the stress distribution uneven, and the silicon film structure is relatively easy to break

The strain gauge-based three-dimensional micro-contact sensor head developed by the University of Eindhoven in the Netherlands. The strain gauge, the circuit and the elastic element are made into a whole through precipitation, plate making, etching and other processes. The force and displacement of the probe in all directions The change of the strain gauge is detected by the strain gauge installed on the sensitive beam. The volume is small, but the detection sensitivity and accuracy of the strain gauge are relatively low, and the probe adopts a triangular topology, which makes the decoupling complicated.

The Swiss Federal Bureau of Metrology and Testing (METAS) has developed an electromagnetic micro-contact probe. The probe has degrees of freedom in three directions, and the detection in each direction is realized by inductance. The force measurement in the three directions is the same, and the structure is mainly Made of aluminum, the electromagnetic probe has a high measurement range, high lateral pick-up sensitivity and low contact force, but its structure is very complicated, difficult to install and adjust, and it adopts a triangular suspension structure, which makes decoupling very troublesome

Images