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Performance testing system for quartz crystal microbalance (QCM)

A technology of micro balance and test system, applied in the direction of weighing equipment test/calibration, etc., can solve the problem of not being able to meet the test system and so on

Inactive Publication Date: 2012-05-16
BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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Problems solved by technology

[0005] There is still no test system that can meet the above conditions

Method used

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  • Performance testing system for quartz crystal microbalance (QCM)
  • Performance testing system for quartz crystal microbalance (QCM)
  • Performance testing system for quartz crystal microbalance (QCM)

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Embodiment Construction

[0015] The quartz crystal microbalance performance testing system of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0016] The quartz crystal microbalance performance testing system of the present invention comprises a vacuum pumping system, a repressurization system, a measurement control system and a vacuum chamber, wherein a cold screen is arranged in the vacuum chamber, and the bottom of the cold screen is connected with the wafer test device and the QCM probe test device In cooperation, the cold shield and the liquid nitrogen storage tank connected to the vacuum chamber and the pipeline constitute a low-temperature system, which establishes the low-temperature environment required for the test, and provides the mechanical installation interface of the wafer test device and the balance probe test device to support the wafer test device and the balance. The probe test device is responsible for providing heat conductio...

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Abstract

The invention discloses a performance testing system for a quartz crystal microbalance (QCM). The performance testing system comprises a vacuum pumping system, a re-pressing system, a measurement control system and a vacuum chamber, wherein a cold shield is arranged in the vacuum chamber; the bottom of the cold shield is matched with a wafer testing device and a QCM probe testing device, and is used for supporting the wafer testing device and the balance probe testing device and providing two heat conductors to be arranged on the cold shield; the vacuum chamber is in vacuum connection with the vacuum pumping system and the re-pressing system; the vacuum pumping system is used for creating a vacuum environment needed by testing for the vacuum chamber; and the testing device is electrically connected with the measurement control system to measure temperatures and frequencies. In the testing system, a clean oil-free vacuum environment is provided, so that the frequency change of the QCM caused by pollution is avoided; and the performance testing system can be used for testing multiple performances of the QCM and a key component of the QCM, i.e., a wafer, and can be used for performing high-temperature aging on an applied balance, and the reliability is enhanced.

Description

technical field [0001] The invention belongs to the technical field of molecular pollution detection and testing, and in particular relates to a quartz crystal microbalance performance testing system. Background technique [0002] Quartz Crystal Microbalances (QCM), also known as vacuum ultramicrobalance, is one of the main instruments for molecular pollution monitoring. Contamination molecules are deposited on the surface of the resonant quartz wafer, resulting in a change in its resonant frequency. The quartz crystal microbalance uses the change in the oscillation frequency caused by the change in the deposition quality on the surface of the quartz crystal to detect the deposition quality of pollutants. [0003] Therefore, for molecular pollution detection experiments, the key is to obtain accurate and stable QCM output frequency. [0004] ASTM released "Standard Practice for QCM measurement of spacecraft molecular contamination in space" in 2004. This recommended method ...

Claims

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Application Information

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IPC IPC(8): G01G23/01
Inventor 焦子龙臧卫国杨东升于钱易忠院小雪
Owner BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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