High-precision measurement system for three-dimensional microdeformation of mechanical device in high-low-temperature case
A technology of a mechanical device and a measurement system, applied in the field of high-precision measurement systems, can solve problems such as low measurement accuracy, and achieve the effect of overcoming the effects of additional friction and additional motion of components
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[0022] The present invention will be further described below in conjunction with the accompanying drawings.
[0023] refer to Figure 1 to Figure 5 , a high-precision measurement system for three-dimensional micro-deformation of a mechanical device in a high-low temperature box, the measurement system includes a string, a three-dimensional air-floating component, and a photoelectric displacement sensing device in three directions, and the three-dimensional air-floating component includes a fixed plate 11. The x-direction air flotation unit, y-direction air flotation unit and z-direction air flotation unit, each air flotation unit includes an air flotation shaft and an air flotation sleeve, and the photoelectric displacement sensing devices in the three directions are respectively installed on the x-direction air flotation unit. The floating unit, the y-direction air flotation unit and the z-direction air flotation unit are used to measure the displacement in the x-direction, y...
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