Two-axis gyroscope with piezo-driven capacitive sensing

Abstract

The invention belongs to the technical field of micro-electro mechanic systems (MEMS), and relates to a piezoelectricity driven capacitance detecting two-axis gyroscope. According to the invention, a lower surface of a gyroscope oscillator with a shape of a round disc, a wheel spoke or a honeycomb is connected to a supporting cylinder. The other end of the supporting cylinder is fixed on a lower pole plate. The lower pole plate is fixed on a carrier. An upper pole plate signal detecting electrode is positioned on a lower end surface of the upper pole plate. A lower pole plate signal detectingelectrode is positioned on an upper end surface of the lower pole plate. The upper pole plate, the lower pole plate and the gyroscope oscillator are assembled, and differential capacitance is formed for detecting output signals. According to the invention, a special modality of a round disc, a wheel spoke or a honeycomb shape is adopted in the gyroscope oscillator, the detection is driven by piezoelectricity effect, and the detection is carried out by using capacitance. Therefore, angular velocities parallel to the upper and the lower surfaces of the gyroscope oscillator can be sensitively detected. According to the invention, with an MEMS micromachining technology, two-axis detection can be realized, the machining technology is easy to realize, the reliability is high, the energy consumption is low, the impact resistance is high, and the gyroscope can operate well in severe environments.

Description

technical field [0001] The invention relates to a micro-gyroscope in the technical field of micro-electro-mechanical systems, in particular to a piezoelectric-driven capacitance-detection dual-axis gyroscope. Background technique [0002] Gyroscope is an instrument that can accurately measure the angle or angular velocity of a moving object, and is the core component of space object attitude control and inertial guidance. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of small size, multi-axis detection, low power consumption, high reliability, long life, and adaptability to various harsh environments. [0003] After searching the literature of the prior art, it was found that in January 2006, at the IEEE MEMS 2006 conference held in Istanbul, Turkey, K. Maenaka and others from Kobe University in Japan published a paper entitled...

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Problems solved by technology

[0005]This technology has the following disadvantages: First, because there are multiple electrodes on the upper and lower surfaces, the processing technology is complicated, the positioning accuracy of the double-sided electrodes is high, and multiple electrodes The lead wire of the gyroscope will also have an impact on the performance of the gyroscope; secondly, the piezoelectric vibrator is a square piezoelectric block, and its rigidity is relatively large, so the effective vibration amplitude generated is small; thirdly, because the piezoelectric vibrator is a square piezoelectric block, its There is a right-angle edge, which will cause stress concentration during the stress process, and affect the reliability and life of the gyroscope under high-frequency working conditions

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