Laser-induced breakdown spectrum in-situ analyzer

Abstract

The invention provides a laser-induced breakdown spectrum in-situ analyzer, belonging to the technical field of material analysis and characterization. The laser-induced breakdown spectrum in-situ analyzer comprises an excitation source system, a laser beam shaping system, a beam splitting system, a high-speed signal collecting system, a signal analyzing system, a sample chamber vacuum system, a continuous excitation synchronous scanning and positioning system and a sample surface imaging system. The laser beam emitted by the laser source is processed by a laser beam shaping system and is subsequently focused on the surface of an analyzed sample that can move in a three-dimensional way. The sample chamber vacuum system provides a closed environment for the analyzed sample so as to fill inthe protective gas. The beam splitting system and the signal colleting system are connected with each other by a photomultiplier; and the plasma spectrum generated on the surface of the sample is converted into an electric signal by the photomultiplier through the optical signal generated by the beam splitting system. The data processing system processes and calculates the photoelectric signal generated by the data processing system and outputs the results such as content of each element, in-situ statistics distribution and the like in the sample. Compared with the prior art, the laser-induced breakdown spectrum in-situ analyzer has the advantages of increasing the functions and extending the sample scope.

Description

technical field [0001] The invention belongs to the technical field of material analysis and characterization, and particularly relates to a laser-induced breakdown spectrum in-situ analyzer, which can achieve high-speed data acquisition and analysis of spectral signals generated by laser ablation material surfaces, and can realize the detection of elements in block solid materials. Quantitative analysis of content, analysis of the composition distribution of each element in the depth direction of surface treatment materials such as coatings; within a large scale (cm 2 Statistical analysis of distribution uniformity, segregation, density and porosity of each element, surface defect and inclusion analysis, etc. Background technique [0002] The chemical composition of a material and its distribution have a great influence on the properties of the material. The metallurgical process not only needs to know the chemical composition of the material, but also expects to know the ...

AI Technical Summary

Problems solved by technology

However, the current commercialized laser-induced breakdown spectrometer can only measure the composition information of local sampling positions, and cannot automatically realize the in-situ statistical distribution of chemical elements on the material surface, and cannot obtain the spatial coordinates and chemical composition content of any position on the material surface. Corresponding distribution, spatial positioning of maximum and minimum segregation, statistical analysis of apparent density, material analysis of statistical segregation degree, and new information such as element content distribution in the material depth direction

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