Two-dimensional photoelectric auto-collimation method and device of polarized light plane mirror reference common-path compensation

Abstract

The invention discloses a two-dimensional photoelectric auto-collimation method and device of polarized light plane mirror reference common-path compensation, and the method and device provided by the invention belong to the technical field of precision instrument manufacture and precision measurement. According to the invention, high-precision photoelectric autocollimation angle measurement is realized for solving the defects in the existing method and device. The method comprises: a plane mirror reference common-path shift quantity monitoring separating device can be used for separating a reference light beam with the feature identical to the that of a measurement light beam, especially the reference light beam which is in the common-path transmission with the measurement light beam, while obtaining measurement light beam in a two-dimensional angle variation by using the polarization feature of the laser and using a polarizing beam splitter and a reference plane reflector; and a controller can be used for controlling a two-dimensional light beam deflection device in real time according to the shift quantity reflected by the reference light beam so as to inhibit the shift quantity coupled in the measurement light beam, thus the precision measurement on the two-dimensional angle variation is realized. The device for realizing the method comprises a two-dimensional photoelectric auto-collimation tube, the plane mirror reference common-path shift quantity monitoring separating device, the controller and the two-dimensional light beam deflection device.

Description

technical field [0001] The invention relates to a two-dimensional photoelectric self-collimation method and device for reference common optical path compensation of a polarized plane mirror, belonging to the technical fields of precision instrument manufacturing and precision testing and measurement. Background technique [0002] With the continuous development of precision manufacturing processing technology and measurement technology, higher and higher requirements are put forward for the measurement accuracy of two-dimensional small angle. The photoelectric self-collimation angle measurement method is widely used in small angle measurement, high-precision angle calibration, flatness measurement of flat plate, angular shake measurement of shaft system, straightness measurement of guide rail, position uncertainty of turntable and other measurement fields. It is a necessary routine measuring instrument for manufacturing, shipbuilding, aerospace, metrology testing, scientific...

AI Technical Summary

Problems solved by technology

[0019] (1) In the method of collimation using the spatial connection of diffraction or interference fringes produced by zone plate, phase plate, binary optical device or double slit, etc., the directionality of the incident light source is required to be high, and the incident light source cannot be suppressed The influence of angular drift, the angular drift of the incident light source directly leads to the drift of the collimation baseline, and the ability to suppress air disturbance in the transmission path is limited;

[0020] (2) In the method of dual optical path compensation, it is difficult to generate symmetrical double beams, and the transmission paths of the measurement beam and the reference beam in the dual optical paths do not coincide, so that the characteristics of the beams in the two optical paths are not completely consistent, and the reference beam cannot fully reflect the measurement. The drift of the beam, the compensation effect is not good;

[0021] (3) In the way of closed-loop feedback control, most of the closed-loop feedback is used to improve the stability of the laser light in a specific direction, which is difficult to apply to the measurement of the self-collimation angle, and the reference beam and the measurement beam cannot be transmitted in the same optical path, so the reference beam Not completely consistent with the characteristics of the measuring beam, which makes the compensation effect poor and restricts the improvement of the final angle measurement accuracy

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