Method for diagnosing self-biased probe of radio-frequency discharge plasma

Abstract

The invention relates to a method for diagnosing a self-biased probe of a radio-frequency discharging plasma, belonging to the field of plasma science and technology. The method is characterized in that two probes, namely, a probe a and a probe b, are arranged in the plasma; the probe a is arranged in a floating state relative to the discharging circuit of the plasma; the probe b is connected with a discharging circuit ground by a blocking capacitor and a sampling capacitor. The voltage alternating-current component amplitude DeltaV between the probe a and the probe b, the first harmonic amplitude absolute value of i1Omega and the secondary harmonic amplitude absolute value of i2Omega of the current of the probe b can be measured; and the electronic temperature Te and the ion density ni can be calculated according to DeltaV, absolute value of i1Omega and absolute value of i2Omega. The method has the benefits of overcoming the influence of the insulating pollution of the probe surface and obtaining the parameters such as the ion density, electronic temperature and the like. The discharge disturbance on the plasma is small as the direct current or alternating-current bias voltage is not applied to the probe.

Description

Technical field [0001] The invention belongs to the field of plasma science and technology, and relates to a radio frequency discharge plasma self-biased probe diagnosis method, which is used for diagnosing radio frequency discharge plasma, can overcome the influence of the insulation pollution of the probe surface, and obtain ion density and electron temperature And other parameters. Background technique [0002] The common method for diagnosing plasma parameters is to place a probe in the plasma and apply a scanning bias voltage, measure and analyze the volt-ampere characteristic curve of the probe current with the scanning bias voltage to obtain various plasma parameters. A serious limitation of this method is that it cannot be used in reactive plasmas where insulation film deposition occurs, because in this case the probe surface will be covered by insulation products and cannot collect current and fail. [0003] In response to this problem, Lee et al. disclosed a plasma diagn...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a radio frequency discharge plasma self-biased probe diagnosis method to solve the above-mentioned floating probe plasma diagnosis method that disturbs the plasma due to the need to add a high-frequency AC bias voltage to the probe. body, change the original state of the plasma, and make the measurement inaccurate

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