Circular membrane piezoelectric ultrasonic transducer
A piezoelectric ultrasonic and transducer technology, which is applied in piezoelectric/electrostrictive transducers, sensors, electrical components, etc., and can solve problems such as reducing the working efficiency of piezoelectric transducers
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[0018] For further elaborating the technical means and effects that the present invention takes to reach the intended invention purpose, below in conjunction with accompanying drawing and preferred embodiment, to its specific implementation, structure, feature and its specific implementation of the ultrasonic transducer proposed according to the present invention Efficacy, detailed below.
[0019] figure 2 It is a structural schematic diagram of the circular thin-film piezoelectric ultrasonic transducer of the present invention. In the present invention, a support layer (103) is arranged on the upper part of the silicon cup formed by bulk silicon etching, and the two vibrating diaphragms are composed of a support layer (103), bottom electrodes (109 and 111), piezoelectric layers and top electrodes (110 and 111). 112) Composition. The bottom electrode is on the support layer (103), the piezoelectric layer is on the bottom electrode, and the top electrode is on the piezoelect...
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Abstract
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Application Information
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