Method for eliminating fundamental waves and odd harmonics of nonlinear errors in wave detection method
A non-linear error and odd harmonic technology, applied in the direction of measuring devices, instruments, special recording/indicating devices, etc., can solve problems such as difficulties, and achieve the effect of powerful functions, wide application range, and increased cost
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[0034] Such as figure 1 As shown, taking the optical application as an example, on the basis of the original laser heterodyne interferometry, the method of the present invention adds the part in the dotted line box in the figure to cooperate with the original laser heterodyne interferometry To realize the principles and functions described in the present invention.
[0035] First, the working principle of the original laser heterodyne interferometry method is explained: the laser is emitted by the laser 1, and the transmitted light through the first beam splitter 2 enters the acousto-optic device 3, and is frequency-shifted by the acousto-optic device 3 and then exits to the second The beam splitter 4, the transmitted light through the second beam splitter 4 is reflected back by the measuring prism 5, and is incident on the third beam splitter 6, the light reflected by the third beam splitter 6 and the light reflected by the second reflector 10 pass through the first The pola...
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