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Manufacturing method of carbon nanotube gas sensor based on corona discharge

A gas-sensing sensor and carbon nanotube technology, applied in the field of gas-sensing sensors, can solve the problems of complex structure and process of carbon nanotube sensors, and achieve the effects of good detection repeatability, high sensitivity and low cost

Inactive Publication Date: 2010-11-24
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is no evaluation of the impact of the detection environment on it, and the structure and process of carbon nanotube sensors grown on silicon substrates are relatively complicated.

Method used

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  • Manufacturing method of carbon nanotube gas sensor based on corona discharge
  • Manufacturing method of carbon nanotube gas sensor based on corona discharge
  • Manufacturing method of carbon nanotube gas sensor based on corona discharge

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Embodiment 1

[0022] A method for manufacturing a gas sensor based on carbon nanotube corona discharge, characterized in that the following steps are adopted:

[0023] A) Cut the annealed high-purity aluminum foil into a suitable size, place it in a 0.3M oxalic acid solution after electrochemical polishing and cleaning, put it in an ice bath, and anodize at a voltage of 40V for 1h; then put the oxidized template in phosphoric acid and chromic acid Soak in the mixed solution for 1 hour, and then repeat the same oxidation steps above; finally, carry out step-down step-down treatment, from 40V to 2V every 10min time interval, until the voltage drops to 10V, the required AAO template can be obtained, and the mixed solution The molar ratio of phosphoric acid and chromic acid in the medium is 3:1, the average diameter of the nanopores of the template is 50nm, and the nanopore density is 10 6 piece / mm 2 , the nanopore length is 10 μm, the FSEM image of AAO template is as follows figure 1 shown; ...

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Abstract

The invention provides a manufacturing method of a carbon nanotube gas sensor based on corona discharge and is characterized by providing a novel carbon nanotube ion type gas sensor by using the unique physical structure of the carbon nanotube and the tip emission effect based on the gas corona discharge principle. The sensor is formed by aligned carbon nanotube arrays grown on an anodic aluminium oxide template. The carbon nanotubes and the electrodes are integrated, thus simplifying the structure of the device and the process and ensuring convenient control and measurement. Compared with the prior art, the gas sensor has the advantages of simple structure, lower cost, high sensitivity, good detection repeatability, low energy consumption, small occupied space and convenient use. The gas sensor requires lower direct current voltage, thus reducing the danger level of operation and being expected to realize the portable gas monitoring device.

Description

technical field [0001] The invention relates to a gas sensor for corona discharge, in particular to a method for manufacturing a gas sensor based on carbon nanotube corona discharge. technical background [0002] At present, gas detection basically uses the gas adsorption of the sensitive element of the gas sensor to change its electrical characteristics such as resistance, capacitance, frequency and other parameters, so as to realize the detection of gas. However, such sensors generally have the disadvantages of being greatly affected by the external environment, long adsorption-desorption time, poor repeatability, small gas selectivity, short service life, complex detection equipment, and high cost. [0003] Since the advent of carbon nanotubes, it has attracted the attention of many research fields because of its unique structure, excellent electrical properties and stable chemical and physical properties. Kong et al. and Varghese et al. respectively studied single-wall ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/70
Inventor 杨昊潘敏陈裕泉
Owner ZHEJIANG UNIV
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