Large turn angle piezoelectric scanning micromirror

Abstract

The invention discloses a large turn angle piezoelectric scanning micromirror integrated by single chips, comprising a micro reflector surface, a piezoelectric micro driver, an angle sensor and a support frame, wherein the reflector surface, the piezoelectric micro driver and the support frame are all manufactured on a same silicon substrate, and the reflector surface and the piezoelectric micro driver are arranged in the structure of the support frame. In the invention, the micromirror is driven by adopting a mode of piezoelectric drive, and the piezoelectric micro driver comprises a plurality of piezoelectric folded beams, therefore, large angle scanning of the micromirror can be realized under lower work voltage. The middle part of the micromirror is supported by a pair of torsion beams to enable the micromirror to rotate around the torsion beams, thereby inhibiting translation outside the micromirror surface and increasing the stability of a system. The invention also integrates the piezoelectric angle sensor and realizes accurate measurement of scanning angles, therefore, an angle detection device is not additionally needed, and the system volume is reduced. The invention can be widely applied to the fields of micro spectrometers, optical imaging and the like.

Description

technical field [0001] The invention relates to the technical field of micro-opto-electromechanical systems, in particular to a piezoelectric scanning micromirror with a large rotation angle. Background technique [0002] Micro-optical-electromechanical systems (MOEMS) refers to MEMS (Micro-electromechanical systems) devices and systems that use micro-processing technology for optical systems. Compared with traditional optomechanical electronic systems, MOEMS is smaller, lighter and faster. Scanning micromirror or micromirror array is an important MOEMS device. Under the action of driving force, the mirror surface of the micromirror is deflected to change the reflection angle of the incident beam and realize the scanning of the reflected beam. It can be widely used in medical imaging, spectrometer, barcode reading and other fields. [0003] According to the different driving methods of the micromirror, it is mainly divided into: electrostatic drive, electromagnetic drive, ...

AI Technical Summary

Problems solved by technology

Its disadvantages are: there is a nonlinear relationship between the electrostatic force of the variable pitch electrostatic drive and the plate displacement, and in order to achieve a larger deflection angle, a higher working voltage (≥50V) is required. A two-dimensional micromirror driven by a comb-teeth electrode, the mirror size is 500μm×500μm, the maximum rotation angle is 9°, but the driving voltage is as high as 170V dc

This method requires multiple devices such as lasers and detectors, which is bulky

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