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Circulating cooling water system of diffusion pump of vacuum coater

A technology of vacuum coating machine and circulating cooling water, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of large water waste, complex refrigeration equipment, environmental pollution, etc., to avoid waste. Effect

Inactive Publication Date: 2010-09-15
XIDIAN UNIV
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  • Description
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  • Application Information

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Problems solved by technology

The former method has no peripheral cooling equipment and is easy to use, but it wastes a lot of water; the latter method uses less water and can be used repeatedly without wasting water, but there is an external refrigeration device, a

Method used

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  • Circulating cooling water system of diffusion pump of vacuum coater
  • Circulating cooling water system of diffusion pump of vacuum coater

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Experimental program
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Embodiment Construction

[0013] refer to figure 1 , the circulating cooling water system of the present invention is mainly composed of two water storage tanks, six water valves, two water pumps, and vacuum coating equipment. Connect the end water outlet a with the first water valve 1, and then connect the first water valve 1 with the first water pump M 1 , the first water pump M 1 Connect with the cooling water inlet of the vacuum coating equipment to form the cooling water inlet pipeline of the vacuum coating machine; connect the pipeline from the cooling water outlet of the vacuum coating equipment, and connect it to the top inlet of the No. 2 water tank through the third water valve 3 Water port e forms a water flow path from the vacuum coating machine to the No. 2 water tank; the water outlet d at the bottom of the No. 2 water tank passes through the second water pump M in sequence 2 and the fourth water valve 4 are connected to the top water inlet f of the No. 1 water tank to form a water flow...

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Abstract

The invention discloses a cooling system of a diffusion pump of a vacuum coater. The cooling system comprises two water tanks, a water pump, a vacuum coating device and a control water valve, wherein a water outlet pipeline a at the bottom end of the water tank 1 is connected to a cooling water inlet of the vacuum coater sequentially through a first water valve (1), a first water pump M1 and a second water valve (2) to form a cooling water inlet pipeline of the vacuum coater; a water outlet pipeline b at the bottom end of the water tank 1 is connected with a water outlet pipeline c at the bottom end of the water tank 2 to form a water outlet pipeline; a water inlet pipeline f of the water tank 1 is connected to a water outlet pipeline d at the bottom end of the water tank 2 sequentially through a fourth water valve (4) and a second water pump M2 to form a water passage from the water tank 1 to the water tank 2; and a water inlet pipeline e at the top of the water tank 2 is connected to a water outlet of the device through a third water valve (3) to form a water passage from the vacuum coater to the water tank 2 so as to realize water circulation. The invention avoids water waste and environmental pollution and can be used for vacuum coating experiments in laboratories of higher education institutions.

Description

technical field [0001] The invention belongs to the technical field of electronic equipment, in particular to a cooling system of a vacuum coating machine oil diffusion pump, which can be used for vacuum coating experiments in laboratories of colleges and universities. Background technique [0002] When using vacuum coating equipment to prepare thin film materials, since the coating process must reach a certain degree of vacuum, oil diffusion pumps are generally used to achieve the vacuum conditions of vacuum coating. The cooling system is an important condition to ensure the normal operation of the oil diffusion pump, and it is also an extremely important system on the vacuum coating device. [0003] The cooling system used for laboratory vacuum coating usually adopts two methods: one is that the vacuum coating equipment is directly connected to the tap water pipe, and the water in the water pipe enters the cooling system of the vacuum coating equipment through self-pressur...

Claims

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Application Information

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IPC IPC(8): C23C14/22
Inventor 张显曹全喜陈启超
Owner XIDIAN UNIV
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