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Photomultiplier tube

A photomultiplier tube and electron multiplication technology, applied in electron multiplier tubes, discharge tubes, multiplier electrodes, etc., can solve the problems of reduced withstand voltage and incident insulating substrates.

Active Publication Date: 2010-08-25
HAMAMATSU PHOTONICS KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, in the conventional photomultiplier tube as described above, there is a tendency that the multiplied electrons are easily incident on the surface of the insulating substrate sandwiched between the dynodes of each stage.
Therefore, the insulating substrate may be charged and the withstand voltage (withstand voltage) may be lowered.

Method used

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Embodiment Construction

[0021] Hereinafter, preferred embodiments of the photomultiplier tube according to the present invention will be described in detail with reference to the drawings. However, in the description of the drawings, the same reference numerals are assigned to the same or corresponding parts, and overlapping descriptions are omitted.

[0022] FIG. 1 is a perspective view of a photomultiplier tube 1 according to a preferred embodiment of the present invention, and FIG. 2 is an exploded perspective view of the photomultiplier tube 1 of FIG. 1 .

[0023] The photomultiplier tube 1 shown in FIG. 1 is a photomultiplier tube with a transmissive photoelectric surface, and is composed of an upper frame 2 (glass substrate), a side wall frame 3 (silicon substrate), and a lower frame 4 (glass substrate). of the box. This photomultiplier tube 1 is an electron tube, wherein, the direction in which light is incident on the photoelectric surface intersects the multiplication direction of electrons...

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Abstract

Electrons are prevented from being made incident onto an insulation part between dynodes to improve a withstand voltage. The photomultiplier tube is provided with a casing having a glass substrate on which a main surface made with an insulating material is formed, dynodes constituted with a 1st stage to an Nth stage (N denotes an integer of 2 or more) which are arrayed so as to be spaced away sequentially from a first end side to a second end side on the main surface, a photocathode which is installed on the first end side so as to be spaced away from the 1st stage dynode to emit photoelectrons, and an anode part which is installed on the second end side so as to be spaced away from the Nth stage dynode, taking out multiplied electrons as a signal, in which a groove, the surface of which is made with an insulating material, is formed between two adjacent dynodes on the main surface of the glass substrate, and the 1st stage to the Nth stage dynodes are fixed on raised parts 45 adjacent to the grooves on the glass substrate.

Description

technical field [0001] The present invention relates to a photomultiplier tube for detecting incident light from the outside. Background technique [0002] The development of small photomultiplier tubes using microfabrication technology has been progressing. For example, a planar photomultiplier tube is known in which a photodiode, a dynode, and an anode are arranged on a light-transmitting insulating substrate (see Patent Document 1 below). With such a structure, weak light can be detected with high reliability, and the size of the device can be realized. [0003] However, in the conventional photomultiplier tube as described above, the multiplied electrons tend to be easily incident on the surface of the insulating substrate sandwiched between the dynodes of each stage. Therefore, the insulating substrate may be electrified to lower the withstand voltage (withstand voltage). [0004] Patent Document 1: Specification of US Patent No. 5,264,693 Contents of the invention...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J43/04H01J43/18
CPCH01J43/243
Inventor 杉山浩之下井英树小玉刚史木下仁志河野泰行井上圭祐
Owner HAMAMATSU PHOTONICS KK
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