Ultra-precise fiber grating displacement sensor

Abstract

The invention discloses an ultra-precise fiber grating displacement sensor which is characterized by being provided with a fixed measuring head shell, wherein the measuring head shell is a barrel-shaped body, an open mouth is arranged at the bottom of the barrel-shaped body, and a crossbeam is arranged on the end surface of the open mouth along the radial direction; a measuring rod is fixed on the inner side wall of the measuring head shell through an upper leaf spring and a lower leaf spring which are mutually parallel, and the measuring rod and the measuring head shell are kept coaxial to form parallel leaf spring guide rails; a pressure spring is arranged at the top end of the measuring rod; and the bottom end of the measuring rod extends from the measuring head shell, and a hard measuring head is fixedly connected with the bottom end of the measuring rod extended from the measuring head shell. The invention has very high sensitivity, simple structure and lower cost and can realize nano-scale micrometer precision within a small range.

Description

technical field [0001] The invention relates to a high-precision displacement sensor, more specifically a nanoscale micrometer sensor. Background technique [0002] With the development of processing technology, the demand for measurement technology of high-precision micro-dimensional variables is increasing day by day. For example, check the thickness, inner diameter, outer diameter, ellipticity, parallelism, straightness, radial runout and other parameters of the workpiece, so contact micro-displacement measuring instruments are widely used in precision machinery manufacturing, national defense, scientific research and metrology departments . Table 1 lists high-precision contact micro-displacement measuring instruments at home and abroad [0003] Table 1 Comparison of technical parameters of contact displacement measuring instruments [0004] [0005] In Table 1 above, the first two micrometers based on inductive sensors have a small measurement range and high precis...

AI Technical Summary

Problems solved by technology

[0005] In the above table 1, the first two micrometers based on inductive sensors have a small measurement range and high precision, but as the measurement range increases, the accuracy decreases

The third type of large-range micrometer based on photoelectric sensors has harsh conditions of use, can only be used for laboratory measurements, and is expensive

Its resolution reaches 60nm, and when subjected to non-axial contact force, the resolution can only reach 10um, and axial contact can only be used to generate contact signals, and cannot be used to measure micro-displacement

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