Electrostatic chucking apparatus and method for manufacturing the same
An electrostatic chuck, DC electrode technology, applied in semiconductor/solid-state device manufacturing, circuits, electrical components, etc., can solve the problems of short service life, reduced productivity, inaccurate temperature adjustment, etc.
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[0036] Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.
[0037] Hereinafter, an electrostatic chuck device and a method of manufacturing the electrostatic chuck device according to the present invention will be described with reference to the accompanying drawings.
[0038] figure 2 An electrostatic chuck device according to one embodiment of the invention is shown.
[0039] refer to figure 2 , an electrostatic chuck device according to an embodiment of the present invention includes a base member 200 and an electrostatic chuck 300.
[0040] The base member 200 is made of metal material. For example, the base member 200 may be made of aluminum (A1). The base member 200 may include an additional extension on which the electrostatic chuck 300 is mou...
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