Method for measuring volume of volume variation chamber of constant-pressure pressure leak calibration apparatus

Abstract

The invention discloses a method for measuring the volume of a volume variation chamber of a constant-pressure pressure leak calibration apparatus, and in particular relates to the method for measuring the volume of the volume variation chamber of the constant-pressure pressure leak calibration apparatus by an inlay technique, which belongs to the technical field of vacuum measurement. The methodfor measuring the volume of the volume variation chamber of the constant-pressure pressure leak calibration apparatus through the inlay is implemented through the following steps: connecting an external container with the volume variation chamber; vacuuming the external container and the volume variation chamber until reaching background; introducing a gas into the volume variation chamber until the gas is expanded to the external container and the pressure in the volume variation chamber and the external container is balanced; and introducing another gas into the volume variation chamber until the gas is expanded to the external container and the pressure in the volume variation chamber and the external container is balanced. In the method of the invention, isothermal expansion technology is adopted to change the volume measurement standard of the volume variation chamber into the volume of a cylinder capable of being accurately measured under a working condition, so measurement accuracy is improved; and water-media transfer measurement is avoided in a measurement process.

Description

technical field [0001] The invention relates to a method for measuring the volume of a variable volume chamber of a constant pressure positive pressure leak calibration device, in particular to a method for measuring the volume of a variable volume chamber of a constant pressure positive pressure leak calibration device with a built-in method, which belongs to the technical field of vacuum measurement . Background technique [0002] In the document "Review of Gas Micro-flow Measurement of German Federal Institute of Physics and Technology (PTB), "Vacuum Science and Technology", No. 4, 2003, Page 289-294", a PTB constant pressure gas flow meter is introduced. The method for measuring the volume change of the bellows in the variable volume chamber. The method is a weighing measurement method, and the method is as follows: after evacuating the variable volume chamber assembly, it is filled with water that has been distilled and degassed 4 times, and a thin tube is used to conn...

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Problems solved by technology

[0003]The disadvantage of this method is that during the measurement process, it cannot be calibrated at the original position, and the variable volume chamber needs to be removed from the vacuum device, so that the vacuum system is exposed to Atmospheric, not conducive to the maintenance of the vacuum system

Secondly, water medium is required for measurement, and the corrugated pipe needs to be processed before it can be reused, resulting in possible changes between the measured value and the actual use value; thirdly, the measurement process is complicated and the measurement time period is long. PTB has recorded only 3 measurements were taken

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