Method and device for measuring appearance and wall thickness of sphere by combining differential confocal and point-diffraction interference

Abstract

The invention belongs to the field of optical precision measurement and relates to a method and a device for measuring the appearance and the wall thickness of a sphere by combining a differential confocal confocal technology and point-diffraction interference. The method realizes the high-precision rapid measurement on the appearance of the outer surface of the sphere by using the point-diffraction interference, the rotation of the measured sphere and the splice of a measuring sub-aperture; and the appearance and wall thickness of the inner surface and the outer surface of a key area of a transparent or semitransparent sphere can be scanned and measured point by point by using the differentia confocal technology. The invention organically integrates a point-diffraction interference technology and the differentia confocal technology so as to realize the synchronous measurement on the appearance and the wall thickness of the inner surface and the outer surface of the sphere, and aims to solve the difficult problems that the traditional AFM or a single confocal sensor and the other scanning methods have low measuring speed, low efficiency, easy leakage in measurement and the like during measuring the surface of the sphere. The invention has broad application prospect in the fields of testing the appearance and the wall thickness of a laser fusion pellet, the appearance and the outline of a spherical surface and the like.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement and can be used for the measurement of the surface topography and profile of a sphere and the internal and external surface profile, topography and wall thickness measurement of a transparent or translucent hollow sphere. technical background [0002] Hollow glass microspheres have the advantages of light weight, high strength, heat insulation, corrosion resistance, non-combustibility, electrical insulation, chemical inertness and good fluidity. They have a wide range of applications in nuclear fusion, hydrogen storage, deep-sea exploration, aerospace and drug diagnosis. Applications. [0003] The commonly used target pellets in laser inertial confinement fusion (ICF) experiments contain D 2 Or DT and other thermonuclear fuel microspheres, it is generally believed that: micro-geometric parameters such as the contour of the inner and outer surfaces of the target pellet and wa...

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Problems solved by technology

[0013] The purpose of the present invention is to solve the problem of high-precision non-destructive measurement of geometric parameters such as internal and external surface contours, topography, and wall thickness of hollow spheres, and propose a method that uses one optical path to organically integrate point diffraction interference and differential confocal technology to realize hollow spheres The method and device for measuring internal and external surface topography, contour and wall thickness can quickly measure the external surface topography of hollow spheres by measuring interference fringes; through the cooperation of confocal technology and high-precision multi-dimensional workbench, the precise focus of the measurement beam is focused on The position of the worktable on the inner and outer surfaces of the hollow sphere, and then obtain the contour height data of the inner and outer surfaces of the measured sphere, and the wall thickness data can be obtained through calculation

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