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Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design

A variable cross-section beam and variable cross-section technology, applied in chemical instruments and methods, calculations, instruments, etc., can solve the problems that MEMS devices cannot be used for system-level simulation design

Inactive Publication Date: 2010-03-17
南通升辉建材科技有限公司 +1
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  • Application Information

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Problems solved by technology

[0005] In order to overcome the above-mentioned technical problems, the present invention proposes a system-level modeling method for variable-section beams whose width varies linearly with the length direction, which solves the current problem that system-level simulation design cannot be performed on MEMS devices with such structures

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  • Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design
  • Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design
  • Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design

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Embodiment Construction

[0089] In the following, the present invention will be further described in combination with system-level component modeling of an actual variable-section beam structure. Known beam length l=200um, w1=30um, w2=5um, t=5um, E=130GP a , ρ=2330kg / m 3 , υ=0.22, B '=0; Initial azimuth α=0, β=0, γ=0; The concrete steps of the example of the present invention are as follows:

[0090] Step 1: Take the length direction of the variable cross-section beam as the x-axis, the width direction as the y-axis, and the thickness direction as the z-axis to establish a local coordinate system.

[0091] Step 2: Deduce the bending stiffness matrix [k of variable-section beams in the xoy plane yij ](i=1, 2, j=1, 2) and the bending stiffness matrix in the xoz plane [k zij ] (i=1, 2, j=1, 2).

[0092] The mechanical model of the cantilever beam is established by constraining the end face 2, and in the xoy plane, the formula (1)-(13) can be used to obtain

[0093] k ...

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Abstract

The invention discloses a method for modeling a variable section beam in micro-electronic-mechanical system (MEMS) level design, which belongs to the field of design of MEMSs. The method comprises thefollowing main processes: firstly, establishing a local coordinate system of a variable section beam; then respectively deducting a rigidity matrix, a damping matrix and a quality matrix of the variable section beam in the local coordinate system according to a structural mechanics and structural matrix analyzing theory and establishing a second order kinetic equation of the variable section beamby the matrixes; and finally coding the second order kinetic equation by a hardware description language and realizing the modeling of a parameterized system level assembly of the variable section beam. The method for modeling the variable section beam of which the width is linearly changed along with the length direction in the system level solves the problem that the system level simulation design can not be performed on the current MEMS device in the structure.

Description

technical field [0001] The invention relates to a variable-section beam modeling method in micro-electro-mechanical system (MEMS) system-level design, and belongs to the field of micro-electro-mechanical system design. Background technique [0002] In the MEMS structure, in order to achieve some design goals of the beam, such as small stress concentration, small size, high strength, light weight, good stability, etc., and considering the change of the bending moment of the beam along the axis, the width is often used Variable-section beams that vary linearly with length replace conventional constant-section beams to optimize the structure. For example, in inertial devices such as micro-accelerometers and micro-mechanical gyroscopes, the bending moment borne by most cantilever beams changes along its axial direction, so it is necessary to ensure that the free end of the cantilever beam structure has a small stiffness to generate a large bending moment. The deformation of the...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/50B81C5/00
Inventor 苑伟政郝星常洪龙
Owner 南通升辉建材科技有限公司
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