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System and method for automatically and circularly complementing crystalline-silicon solar cell texture etch solution

A solar cell, automatic circulation technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problem that the control effect of the concentration and temperature uniformity of the texturing mixture is general, the automatic liquid replenishment cannot be well controlled, and the concentration of the liquid medicine is different. and other problems, to achieve the effect of good consistency, high degree of automation and good uniformity

Active Publication Date: 2010-03-10
鸿舸半导体设备(上海)有限公司
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Problems solved by technology

[0008] In practice, it is found that these two methods have a general control effect on the concentration and temperature uniformity of the textured mixed solution, and the concentration of the solution between the tanks is not the same, so it is impossible to achieve good control of automatic liquid replenishment, and the degree of automation is not high.

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  • System and method for automatically and circularly complementing crystalline-silicon solar cell texture etch solution

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Embodiment Construction

[0028] Below in conjunction with specific embodiment, further illustrate the present invention. It should be understood that these examples are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the teachings of the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of the present application.

[0029] like figure 1 As shown, the main components of the system of the method of the present invention are: reaction tank 8, liquid storage tank 2, liquid medicine quantitative tank 11, pump 5, valve, heating system, flowmeter 9, liquid level gauge 10 and pipeline system. The material of the reaction tank 8 is stainless steel or PVDF or PP, the volume of the tank body is 100-120L, the temperature of the liquid medicine in the...

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Abstract

The invention relates to a system and a method for automatically and circularly complementing a texture-etching solution of a crystalline-silicon solar cell. A liquid conveying pipeline (1) is connected with a liquid storage box (2); the liquid storage box (2), a pump (5), at least three reaction troughs (8) and the liquid storage box (2) are sequentially connected so as to form a circular loop; the liquid storage box (2) is connected with the reaction troughs (8) sequentially by the pump (5), a manual valve (6), an automatic valve (7) and a flow meter (9); the liquid storage box (2) and the reaction troughs (8) are internally provided with a heating system and a liquid level sensor (10); and the liquid storage box (2) is connected with a solution dosing box (11) by the manual valve (6) and the automatic valve (7). In the invention, all reaction troughs are connected by the liquid storage box to form one reaction trough with large volume, the influence of the reaction consumption and the reaction heat on the concentration and temperature of the solution is reduced, the uniformity of the solution is improved, and the changing rate of the concentration is effectively reduced when complementing the solution.

Description

technical field [0001] The invention belongs to the technical field of crystalline silicon solar cell production technology, and in particular relates to an automatic circulation replenishment system and method for texturing liquid of crystalline silicon solar cell. Background technique [0002] In the production process of crystalline silicon solar cells, the process of texturing needs to be adopted. The principle is to use the mixed chemical solution to react with the silicon wafer to form a textured shape on the surface of the silicon wafer. Whether the concentration and temperature of the mixed solution are uniform directly affects the effect of texturing, thus affecting the quality of the cell. [0003] At present, there are two common ways to keep the concentration and temperature of the texturing liquid uniform as follows: [0004] 1. Bubbling + reaction tank heating + manual rehydration [0005] 2. Circulation in the tank + reaction tank heating + manual rehydratio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 严俊李敏
Owner 鸿舸半导体设备(上海)有限公司
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