Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror

Abstract

The invention relates to a detecting method and a detecting device of the surface-shape error of a double curved surface convex reflecting mirror, which takes an aberrationless laser convergent beam as an incident beam scanning the convex of the detected reflecting mirror and takes wavefront detector as a measuring tool to coincide the focus of the incident beam with the virtual focus of the detected double curved surface reflector; the incident beam is imaged at the real focus of the detected double curved surface reflecting mirror after being reflected by the detected reflector, an imaging beam enters in the wavefront detector after being collimated by an anaberration collimating lens, and the surface-shape error of a local area is detected by the wavefront detector; the incident beam radically scans around the virtual focus of the detected double curved surface reflector, the detected double curved surface reflecting mirror rotates a circle around an optic axis when the incident beam scans each step, and the surface-shape error of each local area inside a whole mirror surface is detected circularly; and the detected surface-shape error of the local area is subject to matching and Zernike polynomial polynomial fitting to obtain the surface-shape error of the whole double curved surface convex reflecting mirror. The invention provides a low-cost and high-precision detection means of the large-caliber double curved surface convex reflecting mirror.

Description

technical field [0001] The invention relates to a detection method which is especially suitable for detecting the surface shape error of a large-diameter hyperboloid convex mirror and a detection device for realizing the detection method. Background technique [0002] With the development of ground-based telescopes, the higher the resolution requirements, the larger the aperture of the main reflector, and the next-generation large-scale ground-based and space-based telescopes have greatly increased the aperture. In the fields of large-scale astronomy and space optics, two-mirror optical systems, especially optical systems with hyperbolic convex mirrors as secondary mirrors, are widely used. In recent years, the continuous development of optical processing, manufacturing and detection technology has overcome the problem that the large-aperture primary mirror is difficult to process, but in this type of large-aperture optical system, the diameter of the hyperbolic convex mirro...

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to overcome the many defects of the existing large-caliber hyperbolic convex reflective mirror surface quality detection method that the required detection device is difficult to manufacture and process, high cost, difficult to install and adjust, large system error, and low detection accuracy. Method and device for detecting surface shape error of hyperbolic convex mirror based on aberration-free method

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