Planar motor adopting groove-type coil

Abstract

The invention discloses a planar motor adopting groove-type coil, which is mainly used in the field of mechanical production devices and robots. The planer motor comprises a rotor and a stator, wherein, the rotor is composed of four one-dimensional coil arrays, and the arraying directions of the adjacent coil arrays are in 90 degrees; each one-dimensional coil array is formed by stagger arrangement of a rectangular coil without iron cores and a rectangular groove-type coil without iron cores, and the two short edges of the rectangular groove-type coil without iron cores form a groove type; the long edge of an adjacent groove-type coil is inserted between two long edges of each rectangular coil, or one long edge of each of a left adjacent groove-type coil and a right adjacent groove-type coil is inserted between two long edges of each rectangular coil; the long edges of two kinds of coils are both arranged on one plane; and the stator is composed of a permanent magnet array. Compared with a coil array composed of rectangular coils without iron cores, the coil array can generate bigger thrust in the periodic magnetic field of the permanent magnet array so as to improve the thrust and the accelerated speed of the planer motor.

Description

technical field [0001] The invention relates to a planar motor, in particular to a planar motor using slot coils, which is mainly used in the fields of manufacturing equipment and robots. Background technique [0002] In many industrial equipment, we need to drive the workpiece or the worktable to move in the plane and position it precisely on the plane, such as the stage of the microscope, the silicon wafer stage in the lithography machine and other equipment. The traditional plane positioning device is composed of two or more sets of linear drive units stacked vertically. Each set of linear drive units consists of a rotary motor, a set of linear motion conversion mechanism and a set of linear guide rails, or a linear motor and a set of linear guides. A set of linear guide rails. The linear drive unit located on the bottom not only bears the drive of the end bearing table, but also bears the mass of the top linear drive unit, thus causing the plane positioning device to mo...

AI Technical Summary

Problems solved by technology

If the distance between the two long sides is increased so that they are in two regions with opposite directions of magnetic induction intensity, the direction of the thrust produced by each long side is the same, but the average electric fluid density in the entire air gap will become smaller, and also will affect the thrust of the motor

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