Defect detection system of panel component

Abstract

The invention discloses a defect detection system of a component, which comprises a component to be detected, a platform carrying the component to be detected, a power supply unit and a light source device, wherein the light source device is controlled by the power supply unit to supply detection light to the component to be detected for defect detection; the light source device comprises a cathode structure, an anode structure, a fluorescent layer and a low-pressure gas layer; the fluorescent layer is positioned between the cathode structure and the anode structure; and the low-pressure gas layer is filled between the cathode structure and the anode structure, has the function of inducing the cathode structure to uniformly emit electrons, wherein the air pressure of the low-pressure gas layer is at the range of 0.1-10-3 torr, and the low-pressure gas layer is provided with an electron mean free path where at least enough number of electrons are allowed to directly collide with the fluorescent layer at operating voltage.

Description

technical field [0001] The present invention relates to a component defect detection system, such as detecting optically observable defects on panel components. Background technique [0002] Component defect detection can reduce a necessary process that leads to performance defects in the final product. For example, the components of the display panel or the transparent components may have defects on the surface or inside during the manufacturing process. This defect is also, for example, defects such as foreign matter particles adhering to the surface or surface cracks, or defects such as internal foreign matter particles, holes or cracks, etc., which are detected by various light inspections, such as pinholes, foreign matter or white spots, etc. and other defects. These defects can be detected by light passing through the component or reflected by the component surface. [0003] Figure 1A and Figure 1B A schematic diagram of a conventional component detection mechani...

AI Technical Summary

Problems solved by technology

[0005] The disadvantage of the light box made of fluorescent tubes is that the light box is thick and bulky, and a translucent diffuser and reflection mechanism are required to make the light uniform on the plane

However, the use of a diffuser design will attenuate the light intensity, so the fluorescent tube must increase the brightness to compensate, which consumes more energy and increases the production cost of the user.

In addition, due to the physical characteristics of fluorescent lamps, the light intensity can only be adjusted in multiple stages, and the light color produced is limited to the range of white light and daylight, and the adjustment range is limited.

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