Double arm robot

A robot and dual-arm technology, applied in the field of robotics, can solve the problems of longer transfer period, inability to move up and down independently, and inability to change the distance between the two arms, so as to suppress adverse particles or vibrations, eliminate adverse effects, and improve The effect of transport efficiency

Active Publication Date: 2009-08-12
YASKAWA DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that the distance between the two arms in the vertical direction cannot be changed or the vertical movement cannot be performed independently of each other.
[0006] That is, when the pitch (vertical interval) of the shelves of the stocker and the like does not match the vertical interval of the two arms, first, one arm carries out a workpiece stored on one of the shelves of the stocker, and then Move two arms up and down, and use the other arm to unload the workpiece from another shelf. Even with two arms, the transfer cycle will be longer

Method used

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Embodiment 1

[0050] figure 1 It is a perspective view showing the overall structure of the dual-arm robot of the present invention.

[0051] The double-armed robot 1 of the present invention is provided with two sets of shoulder joints 3, elbow joints 4, and hand joints 5, which are rotatably connected, transmit the rotational force of the rotational drive source, and perform desired actions at various levels. Articulated Arm2. In addition, the hand 8 mounted on the tip of the arm 2 for placing workpieces moves linearly through the arm 2 in the telescopic direction (X-axis direction of the Cartesian coordinate system) shown in the figure, and carries out loading and unloading of workpieces such as stockers. Move out.

[0052] 101 and 102 are arm support members, and 101 is configured to suspend one arm, and 102 is configured to support the other arm. The arms 2 are connected to the supporting member 101 or 102 via the respective shoulder joints 3 , and as a result, the two arms are arr...

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Abstract

A double arm robot having double arms vertically movable independent of each other, having a compact column achieved by controlling the distance between upper and lower support members to an appropriate range, having a reduced installation area and swing radius, and in which adverse effect to a workpiece by operation of the upper and lower members is minimized. The double arm robot (1) has two support members (101, 102) for individually supporting two multi-joint arms arranged in a top- bottom relationship and also has a movement mechanism (11) for connecting the two support members so that they are independently movable in the top-bottom direction along the column (12). When either or both of the two support members (101, 102) move up and down, the distance between the two support members (101, 102) in the top-bottom direction is increased, and when the distance reaches a first predetermined value, the up-down movement of the two support members (101, 102) is stopped.

Description

technical field [0001] The present invention relates to a robot having an arm for accessing thin-plate workpieces such as glass substrates and semiconductor wafers between stockers, and more particularly to a dual-arm robot having two arms. Background technique [0002] Conventionally, robots have been frequently used to transport thin-plate workpieces such as glass substrates and semiconductor wafers. In particular, with the increase in size of glass for liquid crystal panels and PDPs (plasma display screens) in recent years, it is clear that robots that transport these also tend to increase in size. [0003] In this case, in order to save space and improve the handling efficiency of the robot to increase productivity, a dual-arm robot equipped with two arms for placing and transporting workpieces is used. [0004] In particular, by using a dual-arm robot with two arms at different heights in the vertical direction, it is possible to carry workpieces into the stocker with ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677B25J9/06B65G49/06
CPCB25J9/0087B65G49/067B25J9/0084B25J9/042
Inventor 末吉智田中谦太郎石川伸一
Owner YASKAWA DENKI KK
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