Intelligent heat tray temperature controller and temperature control method thereof

Abstract

The present invention relates to an intelligent hot plate temperature controller and a control method thereof. The temperature controller is provided with a main control circuit; the input end of the main control circuit is connected with a hot plate temperature sensor through a temperature detection circuit, and the output end is connected with a hot plate heating device through a temperature control circuit; the main control circuit is also connected with a human-machine interface circuit; and a single chip is used as a control core of the main control circuit and is provided with an internal hot plate temperature control program. The control method comprises the following steps: initializing the configuration and parameters of the electrified system; reading the contents of the memory; modifying the target temperature and various parameters according to needs; acquiring the current actual temperature of the hot plate with the main control circuit through the temperature detection circuit; comparing the current actual temperature with the target temperature to obtain the temperature error; and performing the PID adjustment of the temperature error, so that the actual temperature is maintained at the target temperature. The present invention has the advantages of accurate and constant control, rapid response and consistent repeatability of the temperature when the machine is repeatedly started, and can accurately track the technical process, improve the yield rate, facilitate the debugging and save the time.

Description

technical field [0001] The invention relates to a temperature controller and its temperature control method, in particular to an intelligent hot plate temperature controller and its temperature controller used in the automatic control system of glue leveling and development of semiconductor production equipment and other equipment with similar production processes. Control Method. Background technique [0002] Hot plate temperature controllers are widely used in the semiconductor device manufacturing process, and the production process of the wafer needs a hot plate to complete. The role of the hot plate temperature controller is to meet the temperature requirements of the production process. If the constant temperature value of the hot plate within a certain period of time, the consistency of the temperature at each point within a certain range, the temperature gradient of the temperature rise and fall, and the repetition of the repeated startup temperature Inability to ac...

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Problems solved by technology

[0005] In order to solve the defects of low control accuracy and insufficient response speed of the hot plate temperature controller in the prior art, the problem to be solved by the present invention is to provide an intelligent hot plate temperature controller that can accurately control the temperature of the hot plate surface and is easy to debug. Controller and temperature control method

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