Relay connection member, inspection device and method of manufacturing relay connection member

Abstract

There is provided an inspection device capable of assuring electrical connection to an inspection object and internal electrical connection while coping with downsizing of a terminal of the inspectionobject. The inspection device includes probe (3), a probe holder (4) holding the probe (3), an inspection circuit (5) for outputting an inspection signal to an inspection object (1) via the probe (3), and a relay connection member (6) for electrically connecting the probe (3) to the inspection circuit (5). The relay connection member (6) includes a first connection member (8) having first wiringstructures (11, 12) electrically connected to the probe (3), adjacent structures being formed on different layers, and a second connection member (8) having a second wiring structure (16) electricallyconnected to the wiring structure (7) arranged on the inspection circuit and formed on the same layer. The relay connection member (6) includes the first connection member (8) appropriate for connection to the probe (3) and the second connection member (9) appropriate for connection to the inspection circuit (5). Thus, it is possible to realize preferable electrical connection to both of them.

Description

technical field [0001] The present invention relates to an inspection method for outputting an inspection signal used for the inspection with the other ends of a plurality of probes whose ends are in contact with a plurality of terminals formed on the inspection object when inspecting a designated inspection object. A relay connecting member for electrically connecting circuits, an inspection device using the relay connecting member, and a method for manufacturing the relay connecting member. Background technique [0002] Conventionally, an inspection device for inspecting electrical characteristics of electronic components such as liquid crystal panels is known. As such inspection devices, such as Figure 5 As shown, it is formed by the following parts, namely: a plurality of probes 102 provided corresponding to terminals 101a of an inspection object 101 as an electronic component; a probe holder for holding a plurality of probes 103 ; an inspection circuit 105 for outputt...

AI Technical Summary

Problems solved by technology

[0005] However, conventional inspection devices have the problem that the possibility of poor electrical connection between the relay connection member 104 and the probe 102 and the electrical connection between the relay connection member 104 and the inspection circuit 105 cannot be ruled out.

Since such a connection form is a physically far-fetched structure, new problems such as disconnection in a part of the wiring structure 106 with low physical strength will occur.

Images