Force balancing resonance micro-mechanical gyro
A technology of micro-mechanical gyroscope and force balance, which is applied in the direction of speed measurement by gyro effect, gyroscope/steering sensing equipment, measuring device, etc., and can solve the problems of insufficient sensitivity and resolution of micro-mechanical gyroscope
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[0020] As shown in Fig. 1, the present invention consists of four parts: a double-ended tuning fork resonator 1, an electrostatic comb driver 2, a mass block 3, and an electrostatic comb force balancer 4, and the entire structure is an axisymmetric figure. The mass block 3 is in the middle position and has two degrees of freedom in x and y directions. Two electrostatic comb drives 2 fixed on the base are symmetrically placed in the x direction, and two electrostatic comb drives 2 fixed on the base are symmetrically placed in the y direction. Electrostatic comb force balancer 4 and two double-ended tuning fork resonators DETF 1.
[0021] As shown in Figure 4, the double-ended tuning fork resonator 1 includes a driving static tooth 6, a measuring static tooth 7, a beam 11 and a movable tooth 5, wherein two symmetrical tuning fork beams perform simple harmonic vibration, and the driving static teeth 6 and The movable tooth 5 constitutes a pair of dynamic and static comb teeth, an...
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