Force balancing resonance micro-mechanical gyro

Abstract

The invention relates to an equilibrium type resonance micro mechanical top, which includes static comb tooth driver, mass block, double end tuning fork resonator and static comb tooth strength balancer. When adds the driving voltage to the static comb tooth driver, the mass block does along x axis direction oscillation motion, and circles the z axis in exterior under the rate of angular motion function to produce along y direction coriolis force. The static comb tooth strength balancer used to balance the mass block in y direction Coriolis force and keep the mass block in the equilibrium position of the y direction. The invention structural style enhanced the micro mechanical top sensitivity, the resolution and the dynamic range and realized Coriolis force change, which had the top sensitive angular speed to transform the resonator resonance frequency change, and then through the feedback return route adjustment achieved the new balanced equilibrium type feedback system, and effectively suppressed the non-linear influence.

Description

Force Balanced Resonant Micromachined Gyroscope technical field The invention belongs to the field of micro-mechanical sensors in micro-electro-mechanical systems (MEMS), and is widely used in the fields of automotive electronics, aerospace, weaponry and the like as a micro-inertial device. Background technique The classic frame-type mechanical rotor gyroscope based on the principle of angular momentum is assembled from hundreds of (about 300) parts. It has a complex structure, large volume, and short service life, which cannot meet the requirements of technological development and many new applications. Therefore, solid-state gyroscopes without mechanical rotors have been developed one after another, such as laser gyroscopes, hemispherical resonant gyroscopes, and fiber optic gyroscopes. The performance of the first two gyroscopes can reach the drift accuracy of inertial navigation (0.01° / h); but the price is high and the volume is large, which is still not suitable for t...

AI Technical Summary

Problems solved by technology

The technical problem of the present invention is: to overcome the deficiencies of the prior art, to provide a force-balanced resonant micro-machined gyroscope, to solve the existing micro-machined gyroscope sensitivity, resolution is not high enough, and the problems existing in capacitance detection, suppress non- linear effect

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