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Flexible static compensation type coil moment-increasing fluid gyroscope

A micro gyroscope and compensation technology, applied in the field of micro gyroscope, can solve the problems of difficult to precisely process motor drive bearings, high process requirements, complex structure, etc., and achieve the effects of low cost, simple system structure and high precision

Inactive Publication Date: 2007-10-17
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The system uses motor-driven bearings to drive the rotor to rotate at high speed to generate angular momentum. It adopts a double-stator structure and uses two rotors, the driving rotor and the rotating rotor, so the structure is complex, and it is difficult to process the motor drive precisely by micromachining technology. Bearings, high process requirements

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  • Flexible static compensation type coil moment-increasing fluid gyroscope
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Embodiment Construction

[0013] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: the present embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and processes are provided, but the protection scope of the present invention is not limited to the following implementations example.

[0014] As shown in FIG. 1 , FIG. 2 , FIG. 3 , and FIG. 4 , this embodiment includes: a rotor 1 , a flexible beam 2 , and a stator 3 . The rotor 1 and the stator 3 are connected as a whole through the flexible beam 2, and the flexible beam 2 will be deformed as the relative positions of the rotor 1 and the stator 3 deviate. The rotor 1 is composed of a first base body 8 and an annular cavity 9 . The second base 10 of the stator 3 is processed with a rotating drive coil 4 , a detection electrode 5 , a feedback torque adding coil 6 , and a flexible compensation electrostatic electrod...

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Abstract

A flexible electrostatic compensation type electrostatic moment fluid micro-gyroscopes which belongs to micro-electromechanical system domain includes a rotor, a stator, and a flexible girder, wherein the rotor is composed by a substrate and a ring cavity full of metal fluid, and the stator comprises a second substrate, a rotary drive coil, a detecting electrode, a feedback moment coil and a flexible compensation electrostatic electrode, and eight rotary drive coils, eight detecting electrodes, four feedback moment coils, eight flexible compensation electrostatic electrodes are distributed on the second substrate from inside to outside. The invention is capable of making the stator generate angular momentum using the high speed rotation of metal fluid without relative rotation between rigid structures, eliminating the influence of interference moment caused by flexible girder transmogrification by the electrostatic force moment generated by electrostatic induction between the flexible compensation electrostatic electrode and the rotor, and performing feedback control to the rotor by using the feedback moment electrostatic electrode.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular to a flexible electrostatic compensation type coil-added moment fluid micro-gyroscope. Background technique [0002] There are two types of micro gyroscopes widely studied at present, one is the suspended rotor micro gyroscope, and the other is the flexible gyroscope, each of which has its own characteristics. Suspended rotor micro-gyroscope, the rotor rotates at high speed in a suspended state, and the speed is greatly improved, which helps to achieve high precision. However, the suspended rotor micro-gyroscope generally adopts a double-stator structure, and in order to improve the lateral stiffness of the rotor. Processing the lateral control electrodes makes the processing technology of the suspended rotor micro-gyroscope complicated. In order to remove the influence of air resistance on the rotor, the common suspended rotor micro-gyroscope ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/02G01C19/06G01C19/12
Inventor 张卫平周海军陈文元凌灵
Owner SHANGHAI JIAO TONG UNIV
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