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Detergent composition

A technology of composition and cleaning agent, applied in the field of cleaning agent, can solve the problems of reduced operating efficiency, pipe blockage, pigment blockage, etc., and achieve the effect of less burden

Inactive Publication Date: 2007-07-25
TOKYO OHKA KOGYO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if the pigment-dispersed composition (for example, pigment-dispersed photoresist such as carbon black, pigment-dispersed coating) is cleaned with this cleaning agent, the aggregation and sedimentation of the pigment will occur in the cleaning solution, thereby making the pigment Adhesion to the wall surface of thinner parts such as pipes becomes a cause of clogging
As a result, there is a problem of a reduction in operating efficiency or clogging of nozzles.
[0011] In addition, due to the high boiling point of the aprotic polar solvent N, N-dimethylacetamide is too polar, causing carbon to condense and settle
Therefore, inconvenience such as piping clogging occurs
[0012] In addition, when a single-component alkylaromatic compound is used, the effect cannot be obtained if the compounding amount is not more than that of a mixed alkylaromatic compound.

Method used

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  • Detergent composition
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Examples

Experimental program
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Effect test

no. 1 approach

[0044] [Composition of cleaning agent]

[0045] The cleaning agent according to the first embodiment of the present invention contains at least one solvent and a Si-based surfactant capable of dissolving and removing the pigment-dispersed composition adhering to a substrate such as a semiconductor substrate. Also, the above-mentioned solvents contain aromatic hydrocarbons.

[0046] The solvent contained in the cleaning agent according to the first embodiment of the present invention may be composed of only one solvent, but in order to satisfy various characteristics such as cleaning performance, drying performance, and prevention of sedimentation of the pigment to be cleaned, it is used Mixed solvents of various solvents allow easy design of various cleaning solutions with well-balanced properties. From this point of view, it is preferable to use mixed solvents.

[0047] [solvent]

[0048] The solvent contained in the cleaning agent according to the first embodiment of the p...

no. 2 approach

[0067] [Composition of cleaning agent]

[0068] The cleaning agent according to the second aspect of the present invention contains at least one solvent and a surfactant capable of dissolving and removing the pigment-dispersed composition adhering to a substrate such as a semiconductor substrate.

[0069] In addition, the cleaning agent according to the second embodiment of the present invention is preferably composed of a solvent having a boiling point of 60° C. to 300° C. under normal pressure.

[0070] The solvent contained in the cleaning agent according to the second embodiment of the present invention may be composed of only one kind of solvent, but in order to satisfy various characteristics such as cleaning performance, drying performance, and prevention of sedimentation of the pigment to be cleaned, a variety of solvents are used. A mixed solvent of these solvents can be used to easily design various cleaning solutions with well-balanced properties. From this point of...

Embodiment 1

[0116] 20 parts by mass of PGME, 60 parts by mass of PGMEA, and 20 parts by mass of Solvesso 100 (trade name; manufactured by Exxon Chemical Co.) were mixed, and 0.005 parts by mass of Additol XL-121 (trade name ; Solutia Co., Ltd.), and stirred and mixed to prepare the cleaning agent composition (A).

[0117] When the cleaning agent composition (A) was filled in the glass tube delivered through CFPR GH-1004 in liquid form, no aggregation and sedimentation of the pigment was observed.

[0118] When the cleaning agent composition (A) was filled in the glass tube conveyed through CFPR BK-5005SL in liquid form, aggregation and sedimentation of the pigment were not observed.

[0119] When the cleaning agent composition (A) was filled in the glass tube through which the inkjet ink for color filters was conveyed in liquid form, aggregation and sedimentation of the pigment were not observed.

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PUM

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Abstract

The present invention provides a detergent composition used for cleaning the substrates and devices attached with pigment dispersion composition. Higher cleaning effect can be obtained by using little detergent composition of the invention. One of the said detergent composition is a detergent composition for cleaning and removing pigment dispersion composition, it is characterized in that the detergent composition includes solvent with aromatic hydrocarbon and Si kinds of surface active agent. Another detergent composition is a detergent composition for cleaning and removing pigment dispersion composition, it is characterized in that the detergent composition includes surface active agent and organic solvent, and the range of the hydrogen key component delta H of the Hansen solubility parameter is 4 -10.

Description

technical field [0001] The present invention relates to a cleaning agent for cleaning and removing pigment-dispersed compositions. Background technique [0002] In the manufacture of a semiconductor element or a liquid crystal display element, a photolithography technique using a positive or negative photosensitive resin composition is used. [0003] The photosensitive resin composition is coated on substrates such as semiconductor substrates and glass substrates in the form of a coating solution, and is subjected to appropriate drying treatment to form a coating film. Furthermore, this is selectively exposed, and then a development process is performed, thereby forming a patterned photosensitive resin film. [0004] As a method of applying a photosensitive resin composition to a substrate, the spin coating method is generally used, but in particular, in the field of liquid crystal display device manufacture which is becoming larger and larger, a spin coating (coat and spin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/42G03F7/32G03F7/26C11D1/66
CPCC11D1/82C11D1/94C11D3/187C11D3/43
Inventor 片野彰
Owner TOKYO OHKA KOGYO CO LTD
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