Substrate test gear

A substrate inspection and substrate technology, which is applied to measurement devices, optical testing flaws/defects, instruments, etc., can solve the problems of increasing the distance between the inspected substrate and the backlight, the drive part becoming larger, and the backlight lighting scattering, etc., to achieve high efficiency The effect of visual inspection

Inactive Publication Date: 2010-01-06
OLYMPUS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the substrate appearance inspection device of Patent Document 1, the transmitted illumination unit illuminates from below the swing table, and since the observation direction of the inspector is different from the direction of transmitted illumination, effective transmitted illumination observation cannot be performed.
In addition, there is also a proposed device in which the transmitted illumination unit is fixed on the swing table, and the transmitted illumination device also swings together with the swing table. There is a problem that the size of the substrate to be inspected will increase the size of the drive unit
[0005] In addition, in the substrate inspection device of Patent Document 2, when observation is performed by transmitted illumination at a position behind the moving range of the substrate to be inspected, the distance between the substrate to be inspected and the backlight increases.
[0006] Therefore, especially as the substrate to be inspected increases in size, the illumination of the backlight is scattered, and there is a problem that the brightness necessary for observation cannot be obtained.

Method used

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Examples

Experimental program
Comparison scheme
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no. 1 Embodiment approach

[0040] figure 1 with figure 2 The first embodiment of the present invention is shown. figure 1 The overall view of the substrate inspection device is shown in ; figure 2 Middle represents the enlarged side view.

[0041] Such as figure 1 As shown, the substrate inspection apparatus 1 has: a casing 2, which forms an outer contour; a holder rotating mechanism 3, which rotates a substrate holder 11 holding a substrate W to be inspected; The surface W1 of the pattern is epi-illuminated; the backlight 5 irradiates the back surface W2 opposite to the surface W1 of the substrate W to be inspected; and the moving unit 6 of the backlight 5 . The inner wall surface 2a of the housing 2 is black so that light will not be diffusely reflected. In addition, the stand rotation mechanism 3 has: a turn shaft 7 provided at the turn center; a pair of turn arms 8 rotatably supported on the turn shaft 7 at base end portions of the arms; a pair of stand guides 9 fixed At the front end of eac...

no. 2 Embodiment approach

[0052] image 3 A second embodiment of the present invention is shown, and an enlarged side view of a substrate inspection device is shown. In this embodiment, the same reference numerals are assigned to the same components as those used in the above-mentioned embodiment, and description thereof will be omitted.

[0053] Such as image 3 As shown, in the substrate inspection apparatus 30 of this embodiment, the moving unit 31 for moving the backlight 5 is composed of a rotating arm 32 rotatably supported at the base end on the rotating shaft of the pair of rotating arms 8 . 7 coaxial shaft; actuator 33, which makes the rotating arm 32 rotate. The backlight 5 is fixed to the tip of the swivel arm 32 , and the backlight 5 is rotatable from a retracted position D below the substrate delivery position B of the holder guide 9 to an irradiation position C. As shown in FIG. In addition, one end 33a of the actuator 33 is connected to the rotating arm 32 with a pin, and the other en...

no. 3 Embodiment approach

[0056] Figure 4 A third embodiment of the present invention is shown, and an enlarged side view of a substrate inspection device is shown. In this embodiment, the same reference numerals are assigned to the same components as those used in the above-mentioned embodiment, and description thereof will be omitted.

[0057] Such as Figure 4 As shown, in the substrate inspection apparatus 40 of this embodiment, the moving unit 41 for moving the backlight 5 is constituted by a rotating arm 42 rotatably supported at the base end in the rotating region P of the carriage rotating mechanism 3 . the top; motor 43, which makes the rotating arm 42 rotate. The backlight 5 is fixed to the front end portion of the rotating arm 42 and is set so as to be parallel to the substrate W to be inspected when located at the irradiation position C. As shown in FIG. In addition, the turning arm 42 can move the backlight 5 out of the turning area P of the stand turning mechanism 3 , and move to the ...

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Abstract

The invention provides a substrate inspection apparatus. The substrate inspection apparatus 1 comprises: the swing mechanism 3 for holding and swinging the substrate to be inspected W; a backlight 5 for lighting the backside W2 opposite to the front side W1 of the substrate to be inspected W; and a moving means 6 for the backlight 5. A rotating arm 17 of the moving means 6 is composed of two link levers 19, 20 and a fixing plate 21 used as a fixing member. Each of the ends 19a, 20a of the two link levers 19, 20 are supported, at a prescribed space, by a support member 16 in a rotatable manner. Furthermore, other ends 19b, 20b are supported, at a predetermined space, by a fixing plate 21 respectively in a rotatable manner. The backlight 5 is fixed on the fixing plate 21.

Description

technical field [0001] The present invention relates to a substrate inspection device capable of visually inspecting a glass substrate or the like by means of a transmissive backlight. Background technique [0002] Conventionally, in the manufacturing process of flat panel displays (FPDs), etc., as a method of visually inspecting glass substrates, etc., a method of observing with epi-illumination from the front side of the substrate to be inspected, and at the same time, using light from the back surface Observation is carried out with transmitted illumination from the side, and further, defects such as damage are detected in detail. For example, there has been proposed a substrate inspection device that includes: a swing table that supports a substrate to be inspected so that it can swing; a reflective lighting unit that irradiates the surface of the substrate on the swing table; Transmission is performed on a substrate on a swing table (for example, refer to Patent Docume...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/958G01N21/896
CPCG01N21/88G01N21/8806G01N21/958G01N2021/9513G02F1/1309
Inventor 木内智一
Owner OLYMPUS CORP
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