Cutting device

Abstract

The light emitting unit (109) and the imaging unit (114) constituting the cutting insert detection unit (132) for detecting the state of the cutting edge of the cutting insert face each other and attached to the insert cover (104). Since the light-emitting unit (109) and the imaging unit (114) are opposite to each other, even if there is spray of cutting water, it is possible to clearly recognize the outer peripheral shape of the cutting edge portion (102a) of the cutting insert (102). image. In addition, by attaching the light emitting unit (109) and the imaging unit (114) to the blade cover (104), it is unnecessary to use an optical fiber and no wiring is required. In this way, in the cutting device having the function of taking an image of the cutting edge portion of the cutting insert and detecting its defect and wear, the state of the cutting insert can be reliably grasped without being constrained by the wiring of the optical fiber through which the light for imaging passes. Take a video.

Description

technical field [0001] The present invention relates to a cutting device having a cutting blade, and more particularly to a cutting device having a function of detecting the state of chipping and wear of the cutting blade. Background technique [0002] Wafers formed with multiple devices such as LCs and LSIs are cut vertically and horizontally by cutting blades rotating at high speeds, and are divided into individual chips for use in various electronic devices. [0003] The above-mentioned cutting insert is mounted on a high-speed rotating spindle and used, and a cutting edge portion is formed on the outer periphery thereof. The cutting edge portion is formed by fixing abrasive grains made of diamond or the like by means of electroforming, metal bonding, or resin bonding. Therefore, cutting causes the cutting edge portion to deteriorate over time, causing chipping and wear, and there are defects caused by cutting. The problem that the quality of each device deteriorates. ...

AI Technical Summary

Problems solved by technology

Therefore, in a configuration in which light is irradiated to the cutting blade and the reflected light is captured, the cutting water is splashed by the high-speed rotation of the cutting blade, and the spray of the cutting water scatters the reflected light, and the cutting blade may not be recognized from the obtained image. , so sometimes it is impossible to detect the chipping, wear, etc. of the cutting insert

[0006] In addition, the light emitted from the light-emitting element is guided to the vicinity of the cutting blade by the optical fiber, and the reflected light is also guided to the light-receiving element by the optical fiber. Due to the poor flexibility of the optical fiber, there is also the problem of difficult wiring.

In addition, since the cutting unit including the cutting blade moves during cutting, the optical fiber also moves. In this way, there is also a problem that the optical fiber lacking in flexibility hinders the movement.

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