Forming stripper, and method

Abstract

The invention provides a demoulding device and method. At least one thimble module is used to insert between the mold and the substrate that have completed the transfer molding, so that the mold and the substrate are partially separated and a gap is formed. At this time, the outside air can flow into the mold and the substrate through the gap. Between the substrates, the vacuum effect is eliminated, and the mold and the substrate are separated by the thimble module.

Description

technical field [0001] The invention relates to a demoulding device and method, in particular to a demoulding device and method which have a simple structure and can smoothly separate a mold from a base plate with a slight force. Background technique [0002] In response to the development trend of light, thin, short, and small products, many sophisticated and miniaturized manufacturing technologies have emerged one after another. The evolution of the overall manufacturing technology is from top-down (Top-down) and bottom-up (Bottom-up) -up) manufacturing technologies have intersected at the nanoscale (below 100 μm), and there are many types of nano-manufacturing technologies, but most of them are too slow in processing speed and expensive in required equipment, which is not conducive to mass production. [0003] In terms of nanoimprint technology (Nanoimprint), it mainly uses mechanical force to transfer the micro / nano structure on the mold to the molding material in the sa...

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Problems solved by technology

[0005] At present, there are many known patents aimed at overcoming the above-mentioned vacuum effect, such as a demoulding device and method described in U.S. Patent No. 6,416,311 B1, which uses an external air source to penetrate the mold and pour into the mold and molding materials Eliminate the vacuum between them for demoulding. This method must first form a penetration hole on the mold for external gas injection, and match the position of the gas injection on the device. Therefore, the design of the microstructure pattern of the mold is limited and affects the effective area of ​​the finished product.

[0006] Another example is the demoulding method described in U.S. Patent No. 5,358,672. During the molding process, an extension tape is placed outside the edge of the mold and pressed together with the molding material. When demolding, the extension tape and the mold are directly pulled up. To separate the mold from the molding material, the use of extended tape in this method will reduce the effective molding area, and even affect the molding quality of the extended tape and its surroundings

[0007] In addition, as the device described in Japanese Patent No. 2004066671, it uses a pneumatic cylinder to cooperate with multiple groups of springs with different functions to bear against the outer edge shoulder of the forming substrate. The mold is separated from the molding material, but this mechanism is complicated and not suitable for nano transfer printing where the mold and the substrate are of the same geometric size

[0008] Another example is the method described in Japanese Patent No. 06270170, which uses a shape memory alloy component to be installed at the edge of the mold. Borrowing a stopper against the base plate to lift the mold to completely disengage it. However, this method requires a special shape memory alloy component to match the difference in temperature changes and the design of the stopper. The process is more complicated.

[0009] It can be seen from the content of the above-mentioned previous patents that most of the technical means for destroying the adsorption force between the mold and the molding material due to the vacuum effect start from the edge of the mold or the molding substrate. However, the technical means used must cooperate with complicated Design or special materials can achieve the purpose, or the transfer area or molding quality will be affected by the setting of the demoulding device

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