Semiconductor chip mounting body and manufacturing method thereof
A technology of chip mounting and manufacturing method, applied in the direction of semiconductor/solid-state device manufacturing, semiconductor device, electric solid-state device, etc. Reliability, the effect of improving productivity
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[0021] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0022] FIG. 1 is a diagram showing a cross-sectional structure of a semiconductor chip package 1 according to one embodiment of the present invention. This semiconductor chip package 1 is a package in which semiconductor chips 20 and 30 having a multilayer structure (here, two layers) are stacked and mounted on a wiring board 10 made of, for example, polyimide resin.
[0023] A through hole (electrode formation hole) 11 is provided in the wiring substrate 10, and an electronic circuit composed of a wiring layer 12 is formed on the surface. Penetrating electrodes 11A are formed on the electrode forming holes 11 . 11 A of external electrodes can be formed by electroplating nickel (Ni) of about 1-150 micrometers, for example. As another method, electrodes may be produced by remelting solder after electroplating.
[0024] Ball electrodes 13 made of, for example...
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