Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device

a technology for determining the position of a structure and an object, which is applied in the direction of optical devices, measurement devices, instruments, etc., to achieve the effect of being convenient and economically availabl

Active Publication Date: 2013-11-12
KLA TENCOR MIE
View PDF65 Cites 10 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention is about a device that uses protective gas to determine the position of objects. The device includes an optical component, which is surrounded by protective gas. The gas can be nitrogen, and it helps to prevent damage to the components. The gas can be supplied and extracted from the device using pumps and sensors can be added to measure the pressure and temperature of the gas. In some cases, a tube is used to connect the two parts of the device, but the gas cannot flow through it. Overall, the device helps to improve the accuracy and reliability of positioning systems.

Problems solved by technology

In addition, the range within which the object to be measured is moved must not be influenced by heat production from possibly suitable illumination apparatus.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
  • Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
  • Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0061]FIG. 1 shows a schematic representation of a coordinate measuring machine as has long been known from the prior art. The coordinate measuring machine is identified in the further description as a device. It should also be noted that in the description below and in the drawings, the same elements are identified with the same reference signs.

[0062]A device is used, for example, for determining the width (CD—critical dimension) of a structure on a substrate 2. Also, using the device, the position of a structure 3 on the substrate can be determined. Although the device shown in FIG. 1 has long been known from the prior art, for the sake of completeness, the operation of the device and the arrangement of the individual elements of the device will be discussed.

[0063]The device 1 comprises a measuring table 20, which is arranged displaceable on air bearings 21 in a plane 25a, in the X-coordinate direction and in the Y-coordinate direction. For the mounting of the measuring table 20, ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A device for determining the position of a structure on an object in relation to a coordinate system is disclosed. The object is placed on a measuring table which is movable in one plane, wherein a block defines the plane. At least one optical arrangement is provided for transmitted light illumination and / or reflected light illumination. The optical arrangement comprises an illumination apparatus for reflected light illumination and / or transmitted light illumination and at least one first or second optical element, wherein at least part of the at least one optical element extends into the space between the block and an optical system support. At least one encapsulation is provided, encapsulating at least one optical component of at least one optical arrangement and / or at least one optical element.

Description

RELATED APPLICATIONS[0001]This application is a continuation-in-part of U.S. patent application Ser. No. 13 / 024,190 filed Feb. 9, 2011, which is a divisional of U.S. patent application Ser. No. 12 / 015,437 filed Jan. 16, 2008 (now U.S. Pat. No. 7,903,259 issued Mar. 8, 2011), which claims benefit of provisional 60 / 889,595 filed Feb. 13, 2007, and also claims priority to German Patent Application No. 10 2007 007 660.8 filed on Feb. 13, 2007, and to German Patent Application No. 10 2007 049 133.8 filed on Nov. 10, 2007, all of which are incorporated herein by reference in their entirety.BACKGROUND OF THE INVENTION[0002]The present invention relates to a device for determining the position of a structure on an object. In particular, the invention relates to a device for determining the position of a structure on an object in relation to a coordinate system. The object is placed on a measuring table which is movable in one plane, wherein a block defines a plane in which the measuring tab...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(United States)
IPC IPC(8): G01B11/02
CPCG01B11/002G03F1/84G01B11/03G03F7/70616G01B9/02012G01B9/02027G01B9/02082
Inventor HEIDEN, MICHAEL
Owner KLA TENCOR MIE
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com