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Liquid jet head and a liquid jet apparatus

a liquid jet and apparatus technology, applied in printing and other directions, can solve the problems of liable breakage of the piezoelectric elements used in the ink jet type recording head, and achieve the effects of preventing improving the durability of the vibrating plate, and improving the piezoelectric material layer

Active Publication Date: 2011-10-04
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention provides a liquid jet head that prevents piezoelectric elements from being broken. The head includes a flow channel forming plate and a piezoelectric element with a smaller lower electrode width than the pressure generation chamber, and an upper electrode covering the end surfaces of the lower electrode. The distance between the upper electrode and the lower electrode satisfies a certain relationship to prevent insulation breakdown. The piezoelectric material layer is also covered with an upper electrode film to prevent breakage due to moisture. The lower electrode may form a common electrode for multiple piezoelectric elements, and the upper electrode may be divided by a partition wall between pressure generation chambers to improve durability. A protective film made of a moisture-resistant material may be provided to cover the edge portion of the upper electrode and the exposed surface of the piezoelectric material layer. The invention provides a reliable liquid jet apparatus with improved durability.

Problems solved by technology

The piezoelectric elements, which are used in such an ink jet type recording head, are liable to be broken due to external environment, such as humidity or the like.

Method used

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  • Liquid jet head and a liquid jet apparatus
  • Liquid jet head and a liquid jet apparatus
  • Liquid jet head and a liquid jet apparatus

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first embodiment

[0038]FIG. 1 is an exploded perspective view showing the schematic configuration of an ink jet type recording head, which is an example of a liquid jet head, according to a first embodiment of the invention. FIG. 2 is a plan view of FIG. 1 and a sectional view taken along the line A-A′ of FIG. 1.

[0039]As shown in the drawings, in this embodiment, a flow channel forming plate 10 is made of a silicon monocrystal plate having a crystal surface direction (110), and an elastic film 50 made of an oxide film is formed on one surface of the flow channel forming plate 10. In the flow channel forming plate 10, a plurality of pressure generation chambers 12 that are partitioned by a partition wall 11 are arranged in a width direction of the flow channel forming plate 10. The elastic film 50 forms one surface of each of a plurality of pressure generation chambers 12.

[0040]The flow channel forming plate 10 is provided with an ink supply channel 13 and a communicating channel 14, which are partit...

second embodiment

[0057]FIG. 5 is a sectional view showing the configuration of a piezoelectric element according to a second embodiment of the invention. As shown in FIG. 5, in this embodiment, the piezoelectric material layer 70 is formed successively to extend over a plurality of pressure generation chambers 12 arranged. That is, the second embodiment is the same as the first embodiment, except that a piezoelectric material layer 71 remains between the arranged piezoelectric elements 300 to have a thickness smaller than that of the piezoelectric material layer 70 constituting the piezoelectric elements 300. The thickness of the piezoelectric material layer 71 is not particularly limited, and may be appropriately set depending on the displacement of each of the piezoelectric elements 300.

[0058]In this way, if the piezoelectric material layer 70 is provided successively, the vibrating plate, that is, the elastic film 50 and the insulator film 55 can be prevented from being broken when the piezoelect...

third embodiment

[0060]FIG. 6 is an exploded perspective view showing the schematic configuration of an ink jet type recording head according to a third embodiment of the invention. FIG. 7 is a plan view of FIG. 6, and a sectional view taken along the line C-C′ of FIG. 6. FIG. 8 is a sectional view showing the configuration of a piezoelectric element according to the third embodiment of the invention. The same members as the members shown in FIGS. 1 to 3 are represented by the same reference numerals, and descriptions thereof will be omitted.

[0061]This embodiment is the same as the first embodiment, except that lower electrode films 60 constituting the piezoelectric elements 300 forms a common electrode film of the piezoelectric elements 300, and upper electrode films 80 form individual electrodes.

[0062]As shown in the drawings, the lower electrode film 60 of this embodiment extends from one end portion in the longitudinal direction of each of the pressure generation chambers 12 to the peripheral wa...

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Abstract

A lower electrode 60 in a region opposite each of pressure generation chambers 12 is formed to have a width smaller than the width of the corresponding pressure generation chamber 12, and an upper surface and an end surface of the lower electrode 60 in a region corresponding to each of the pressure generation chambers 12 is covered with a piezoelectric material layer 70. An end surface of the piezoelectric material layer 70 forms a slope surface sloping downward toward the outside, an upper surface and an end surface of the piezoelectric material layer 70 in the region opposite each of the pressure generation chambers 12 are covered with an upper electrode 80, and a distance D1 between the upper surface of the lower electrode 60 and the upper surface of the piezoelectric material layer 70 and a distance D2 between the end surface of the lower electrode 60 and the end surface of the piezoelectric material layer 70 satisfy the relationship D2≧D1.

Description

BACKGROUND OF THE INVENTION[0001]The entire disclosure of Japanese Patent Application No. 2008-014265, filed Jan. 24, 2008 is incorporated by reference herein.FIELD OF THE INVENTION[0002]The present invention relates to a liquid jet head that jets liquid droplets from nozzles by displacement of piezoelectric elements, and a liquid jet apparatus, and in particular, to an ink jet type recording head that jets ink droplets as liquid droplets, and an ink jet type recording apparatus.INVENTION OF RELATED ART[0003]An ink jet type recording head, which is an example of a liquid jet head jetting liquid droplets, includes a flow channel forming plate having pressure generation chambers, and piezoelectric elements provided on one surface of the flow channel forming plate, each of the piezoelectric elements having a lower electrode, a piezoelectric material layer, and an upper electrode. Pressure is given into the pressure generation chambers by displacement of the piezoelectric elements, and ...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): B41J2/045H10N30/00
CPCB41J2/055B41J2/14233B41J2/14209B41J2002/14241B41J2002/14419
Inventor YAZAKI, SHIRO
Owner SEIKO EPSON CORP
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