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Storage shelf

a storage shelf and shelf body technology, applied in the field of storage shelves, can solve the problems of inability to support the object to be vibration-isolated, the object may be subject to vibration transmission, etc., and achieve the effects of reducing vibration, reducing vibration, and maintaining load-carrying capacity

Inactive Publication Date: 2016-05-19
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This configuration allows for reduced vibration transmission while maintaining the load-carrying capacity, preventing the wafer carriers from tilting and optimizing space usage by arranging elastic bodies according to the center of gravity of the wafer carriers.

Problems solved by technology

Examples of the storage shelf include one provided along a track of an overhead carrier and one suspended from a ceiling, such storage shelves may be subjected to vibration transmitted when the overhead carrier travels.
However, when the spring constant of the vibration-isolating member is set lower, a problem may occur in that the object to be vibration-isolated cannot be supported while the elasticity of the vibration-isolating member is maintained.

Method used

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first preferred embodiment

[0023]FIG. 1 is a perspective view illustrating a storage shelf according to a preferred embodiment of the present invention. This storage shelf 1 depicted in FIG. 1 is installed in a semiconductor conveyance system of a semiconductor manufacturing plant, for example. The storage shelf 1 stores therein a front-opening unified pod (FOUP: wafer carrier) 100 (see FIG. 3) accommodating wafers. The FOUP 100 accommodates a plurality of wafers each preferably having a diameter of 300 millimeters or 450 millimeters, for example.

[0024]The storage shelf 1 includes a frame unit 10 and placement units 20a, 20b, 20c, and 20d. The frame unit 10 supports the placement units 20a to 20d. The frame unit 10 includes suspending members 3a, 3b, 3c, and 3d, connecting members 5a and 5b, and beam members 7a and 7b.

[0025]The suspending members 3a to 3d are pillar members extending in the vertical direction (Z-direction), provided in plurality (for example, preferably four in the present preferred embodime...

second preferred embodiment

[0055]A second preferred embodiment of the present invention will be described hereinafter. FIG. 5 is a side view of a storage shelf according to the second preferred embodiment. As depicted in FIG. 5, this storage shelf 1B includes the frame unit 10 and the placement unit 20a (20b, 20c, 20d (see FIG. 1)). The frame unit 10 supports the placement unit 20a (20b to 20d). The frame unit 10 includes the suspending members 3a to 3d (see FIG. 1), the connecting members 5a and 5b, and the beam members 7a and 7b.

[0056]The placement unit 20a includes a shelf plate 24A. The shelf plate 24A is a plate-shaped member having a rectangular or substantially rectangular shape, and the FOUP 100 is placed thereon. The shelf plate 24A has a width in the X-direction larger than the distance between the beam members 7a and 7b, and is arranged over the beam members 7a and 7b. The shelf plate 24A is arranged on the beam members 7a and 7b with the elastic bodies 80 and 81 interposed therebetween.

[0057]The ...

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PUM

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Abstract

A storage shelf reduces vibration while maintaining load-carrying capacity and includes placement units on which a FOUP is placed, and a frame unit that supports the placement units. The placement units include frames that are arranged on the frame unit with first elastic bodies interposed therebetween, and a shelf plate that is arranged on the frames with second elastic bodies interposed therebetween and is configured to place thereon the FOUP.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a storage shelf that stores therein a front-opening unified pod (FOUP).[0003]2. Description of the Related Art[0004]A semiconductor conveyance system is provided with a storage shelf that temporarily stores therein FOUPs as wafer carriers. Examples of the storage shelf include one provided along a track of an overhead carrier and one suspended from a ceiling, such storage shelves may be subjected to vibration transmitted when the overhead carrier travels. Because wafers are products that require high precision, it is desired to reduce the effect of the vibration.[0005]As a mechanism for preventing vibration, one described in Japanese Patent Application Laid-Open Publication No. 2012-15371, for example, is known. In the one described in Japanese Patent Application Laid-Open Publication No. 2012-15371, a receiving base on which a load is placed is provided with a viscoelastic body.[0006]In...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): B65G1/02
CPCB65G1/026B65G1/02B65G2201/0297B65G2207/20B65G2207/28B65G2207/40H01L21/67769A47B55/00
Inventor NAGAMINE, SHOHEI
Owner MURATA MASCH LTD
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