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Deposition Mask and Method of Manufacturing the Same

a mask and electroforming technology, applied in the field of deposition masks, can solve the problems of mask defects, difficult to manufacture high-resolution masks using chemical etching methods, and mask sheets manufactured using electroforming are more deformed by heat than conventional masks

Inactive Publication Date: 2012-09-20
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0011]However, aspects of the present invention are not restricted to the ones set forth herein. The above and other aspects of the present invention will become more apparent to one of ordinary skill in the art to which the present invention pertains by referencing the detailed description of the present invention given below.

Problems solved by technology

Therefore, it is very difficult to manufacture a high-resolution mask using the chemical etching method.
However, a mask sheet manufactured using electroforming is more deformed by heat than a conventional mask made of an Invar material.
Therefore, the positions of apertures of the mask sheet may be changed by heat during a deposition process, and the deformation of the mask sheet due to heat may create deposition shadows, causing mask defects.

Method used

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  • Deposition Mask and Method of Manufacturing the Same
  • Deposition Mask and Method of Manufacturing the Same

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Embodiment Construction

[0030]The present invention will now be described more fully with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. The same reference numbers indicate the same components throughout the specification. In the attached figures, the thickness of layers and regions is exaggerated for clarity.

[0031]It will also be understood that, when a layer is referred to as being “on” another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. In contrast, when an element is referred to as being “directly on” another element, there are no intervening elements present.

[0032]FIG. 1 is a pe...

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Abstract

A deposition mask comprises a mask frame having an open window defined in a center thereof, a first mask sheet placed on the mask frame and including a plurality of open regions and a separation region which separates the open regions, and a second mask sheet placed on the first mask sheet and including a first aperture portion in a region which contacts the separation region of the first mask sheet.

Description

CLAIM OF PRIORITY[0001]This application makes reference to, incorporates the same herein, and claims all benefits accruing under 35 U.S.C. §119 from an application earlier filed in the Korean Intellectual Property Office on the 15th of March 2011 and there duly assigned Serial No. 10-2011-0023024.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to a deposition mask, and more particularly, to a deposition mask used in the manufacture of a display device.[0004]2. Description of the Related Art[0005]Electroluminescent elements, which are self-luminous display elements, are drawing attention as next-generation display elements due to their wide viewing angle, high contrast, and high response speed.[0006]These electroluminescent elements are divided into inorganic electroluminescent elements and organic electroluminescent elements according to the material which forms a light-emitting layer. Organic electroluminescent elements have higher lumi...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): B05C11/00B32B37/14B23P11/00B32B37/02
CPCC23C14/042Y10T29/49826H01L51/0011H01J9/24H01J11/48H10K71/166H10K50/8426B05B12/20B05C21/005
Inventor KO, JUNG-WOOKOBAYASHI, IKUNORI
Owner SAMSUNG DISPLAY CO LTD
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