Semiconductor memory device
一种存储装置、半导体的技术,应用在半导体器件、信息存储、静态存储器等方向,能够解决控制器控制复杂、电气功耗限制、控制复杂等问题,达到增强电流提供能力、增加有效栅极宽度、提高写操作速度的效果
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[0059] Hereinafter, preferred embodiments of the present invention will be explained in detail with reference to the accompanying drawings.
[0060] FIG. 1 is a schematic plan view of a relevant portion of a semiconductor memory device according to a preferred embodiment of the present invention. Fig. 2 is a schematic cross-section along line A-A in Fig. 1 . Fig. 3 is a schematic cross-section along line B-B in Fig. 1 . This embodiment is the preferred embodiment when the present invention is applied to PRAM
[0061] Example.
[0062] As shown in FIG. 1 , the semiconductor memory device according to the present embodiment includes a plurality of active regions 10 , and a gate electrode 20 arranged in a fishbone shape on each active region 10 .
[0063] The active region 10 extends along the Y direction shown in FIG. 1 . Between the active regions 10 along the X direction, element isolation regions 19 are adjacently arranged. In the active region 10, a plurality of source ...
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