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Micro-groove feature segmentation method and system based on white light interferometry

A white light interference and micro-groove technology, applied in the field of image processing, can solve the problems of strong uncertainty and low efficiency, and achieve the effect of strong certainty, high segmentation efficiency and accuracy

Pending Publication Date: 2022-07-01
HUAZHONG UNIV OF SCI & TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of the above defects or improvement needs of the prior art, the present invention provides a micro-groove feature segmentation method and system based on white light interferometry to solve the technical problems of low efficiency and strong uncertainty in the prior art

Method used

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  • Micro-groove feature segmentation method and system based on white light interferometry
  • Micro-groove feature segmentation method and system based on white light interferometry
  • Micro-groove feature segmentation method and system based on white light interferometry

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Embodiment 1

[0050] A micro-groove feature segmentation method based on white light interferometry, such as figure 1 shown, including the following steps:

[0051] S1. Calculate the normalized discrete height value and gradient value at each measurement point in the three-dimensional image of the micro-groove; wherein, the three-dimensional image of the micro-groove is obtained based on white light interferometry;

[0052] In this embodiment, it is assumed that the discrete coordinates of the measurement points in the three-dimensional image of the microgrooves obtained by the white light interferometer are (x, y), all the measurement points can form a set N, and the number of elements in the set N is num, that is, the microgrooves The total number of measurement points in the 3D image of the slot. The normalized discrete height value z(x,y) and gradient value g(x,y) at the measurement point with coordinates (x,y) are:

[0053] z(x,y)=round[(h(x,y)-h min ) / Δ]

[0054] g(x,y)=d(x,y)-d ...

Embodiment 2

[0112] A microgroove feature segmentation system based on white light interferometry, comprising: a memory and a processor, wherein the memory stores a computer program, and the processor executes the microgroove provided in Embodiment 1 of the present invention when the processor executes the computer program Slot feature segmentation method.

[0113] The relevant technical features are the same as those in Embodiment 1, and are not repeated here.

Embodiment 3

[0115] A computer-readable storage medium, the computer-readable storage medium comprising a stored computer program, wherein, when the computer program is run by a processor, the device where the storage medium is located is controlled to execute the microcomputer provided in Embodiment 1 of the present invention. Groove feature segmentation method.

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Abstract

The invention discloses a micro-groove feature segmentation method and system based on white light interferometry, and belongs to the field of image processing. Analysis of features of steps, transition areas, channels and noise in a micro-groove three-dimensional image shows that when two attributes of height and gradient are adopted for description, the interior of each feature is uniform and consistent, the difference between the features is large, and the attribute description between the features is basically not crossed, so that the accuracy of the feature description is greatly improved. According to the method, two parameters of height and gradient are used as two-dimensional attributes to describe each feature, so that the influence caused by noise can be avoided, and meanwhile, the distinguishing description capability on three to-be-extracted features of steps, transition regions and channels is relatively high; besides, a surface feature probability description method is adopted, automatic segmentation of groove microstructure features is realized based on a maximum information entropy principle, and height matrixes of various features for evaluation are obtained; the process does not need manual interference, the segmentation efficiency and accuracy are high, and the certainty is high.

Description

technical field [0001] The invention belongs to the field of image processing, and more particularly, relates to a method and system for micro-groove feature segmentation based on white light interferometry. Background technique [0002] Grooved microstructures are widely present on the surface of micro-nano products such as microchips, micromirror arrays, and MEMS micromechanical systems. White light interferometry is a commonly used and effective microstructure surface measurement technology, which can obtain three-dimensional images of microstructure surface topography. After the white light interferometry system measures the three-dimensional data of the grooved microstructure surface, it is necessary to analyze and evaluate the geometric characteristics of the grooved microstructure surface according to the standard evaluation method, so as to evaluate the geometric quality and processing technology of micro-nano products. According to ISO5436 and NIST recommendations,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06V10/26G06V10/44
Inventor 雷自力刘晓军赵丽
Owner HUAZHONG UNIV OF SCI & TECH
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