Three-dimensional force flexible tactile sensor with high tangential angular resolution
A tactile sensor and resolution technology, applied in instruments, force/torque/power measuring instruments, measuring devices, etc., can solve the problems of inability to restore the sensing unit, not suitable for large-area layout, and low three-dimensional force accuracy. Achieve the effect of fewer leads, high tangential angular resolution, and improved detection resolution
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[0032] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0033] like figure 1 and figure 2 As shown, the sensor proposed by the present invention includes a top layer 1 , a middle layer 2 and a bottom layer 3 , and the top layer 1 , the middle layer 2 and the bottom layer 3 are stacked and arranged from top to bottom. The sensor generally presents a cylindrical structure with a maximum diameter of 6mm and a height of 2.5mm.
[0034] The top layer 1 is mainly composed of a spherical boss 4, a top layer flexible substrate 5 and a top layer electrode 6 stacked in sequence from top to bottom. The top surface of the top layer flexible substrate 5 is closely attached to the bottom surface of the spherical boss 4, and the top layer The end surface of the flexible base 5 is provided with an annular protrusion, and the outer peripheral surface and the inner peripheral surface of the annular protrusion are both convex...
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