Ultrahigh vacuum sample transfer cavity

Abstract

The invention discloses an ultrahigh vacuum sample transfer cavity which comprises a transfer cavity, an auxiliary cavity, a sample transfer magnetic rod, a swing magnetic rod, an observation window, an ion pump, a gate valve, an air inlet valve and a vacuum gauge. A vacuum flange capable of being in vacuum sealing connection with other devices is arranged on the outer side of the vacuum pipeline; five vacuum pipelines are welded to the auxiliary cavity, vacuum flanges capable of being in vacuum sealing connection with other devices are arranged on the outer sides of the vacuum pipelines, and the sample transfer magnetic rod, the swing magnetic rod, the observation window, the ion pump and the gate valve are connected with the transfer cavity; the other end of the gate valve is connected with an auxiliary cavity flange, and the vacuum gauge and the air inlet valve are connected with the auxiliary cavity flange. In this way, it can be guaranteed that the sample is always in the ultrahigh vacuum environment when transferred between the ultrahigh vacuum systems, the sample is prevented from being polluted by the outside, meanwhile, vacuum of equipment cannot be damaged, and operation is convenient.

Description

technical field [0001] The invention relates to an ultra-high vacuum instrument, in particular to an ultra-high vacuum sample transfer chamber. Background technique [0002] Generally speaking, the ultra-high vacuum equipment system is composed of vacuum pumps, vacuum gauges, vacuum chambers and other components with the help of vacuum pipelines according to certain requirements. To ensure that a specific vacuum environment is obtained and maintained in a certain space (typical vacuum degree is better than 1x10-9mbar), to ensure that a certain process or physical process is implemented in the vacuum system. Ultra-high vacuum systems are widely used in various research fields such as semiconductors, machining, physics, chemistry, materials and biological sciences. [0003] After the sample is prepared in the ultra-high vacuum system, in order to ensure its stable properties, it usually needs to be tested and analyzed in an environment that does not break the ultra-high vacuu...

AI Technical Summary

Problems solved by technology

However, most of the operations are complicated, and each method cannot avoid the operation step of "open cavity sampling", which exposes the sample to a non-vacuum gas environment

Once the vacuum environment around the sample is broken, the gas a

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