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Detection device for preventing dislocation of vacuum pump rotor of vacuum sputtering instrument

A vacuum sputtering and detection device technology, which is applied to components, pumps, and pump control of elastic fluid pumping devices. It can solve problems such as rotor misalignment, low production efficiency, and overheating of the pump body to improve production efficiency. and stability, improving equipment safety, improving equipment maintenance efficiency and production efficiency

Inactive Publication Date: 2021-12-07
王洪义
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Aiming at the deficiencies of the prior art, the present invention provides a detection device for vacuum sputtering apparatus to prevent vacuum pump rotor misalignment, which has the advantages of automatically detecting the position of the rotor, preventing overheating of the pump body, and improving production efficiency, and solves the problem of existing equipment rotor Misalignment, overheating of the pump body, and low production efficiency

Method used

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  • Detection device for preventing dislocation of vacuum pump rotor of vacuum sputtering instrument
  • Detection device for preventing dislocation of vacuum pump rotor of vacuum sputtering instrument
  • Detection device for preventing dislocation of vacuum pump rotor of vacuum sputtering instrument

Examples

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Comparison scheme
Effect test

Embodiment 1

[0026] see figure 1 , a detection device for vacuum sputtering instrument to prevent vacuum pump rotor misalignment, comprising a pumping mechanism 1, a detection mechanism 2 is movably connected inside the pumping mechanism 1, the detection mechanism 2 includes a slider 21, and the pumping mechanism 1 is provided with a The slot compatible with the slide block 21 is used to install the slide block 21 to facilitate the movement of the slide block 21. Both sides of the slide block 21 are movable with return springs 22 for driving the slide block 21 to reset. The inside of the slide block 21 is fixedly connected with Swivel 23.

[0027] After the rotor 13 is dislocated, the detection mechanism 2 and the transmission mechanism 3 are triggered during operation to realize the function of automatically detecting the position of the rotor 13, improving equipment stability and production efficiency; the clutch mechanism 4 is triggered during the operation of the transmission mechanism...

Embodiment 2

[0032] see Figure 1-4 , a detection device for a vacuum sputtering instrument to prevent vacuum pump rotor misalignment, including an air pumping mechanism 1, the air pumping mechanism 1 includes a housing 11, and the top of the housing 11 is provided with an air inlet and an exhaust port for vacuuming , the middle part of the housing 11 is movably connected with the driven shaft 12, the outer ring of the driven shaft 12 is fixedly connected with the rotor 13, the middle part of the rotor 13 is movably connected with the rotating rod 14, and the middle part of the rotating rod 14 is movably connected with a push-pull spring 15, and the inside of the rotor 13 is set There is a groove suitable for the rotating rod 14 and the push-pull spring 15, which is used to install the rotating rod 14, so as to facilitate the movement of the rotating rod 14, and the detection mechanism 2 is movably connected inside the air extraction mechanism 1, and the detection mechanism 2 includes a sli...

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Abstract

The invention relates to the technical field of electronic component manufacturing, and discloses a detection device for preventing dislocation of a vacuum pump rotor of a vacuum sputtering instrument. The detection device comprises an air exhaust mechanism, a detection mechanism is movably connected in the air exhaust mechanism, the detection mechanism comprises a sliding block, a groove matched with the sliding block is formed in the air exhaust mechanism and is used for installing the sliding block, convenience is provided for the sliding block to move, reset springs are movably arranged on the two sides of the sliding block and used for driving the sliding block to reset, and a rotating ring is fixedly connected to the inner side of the sliding block. According to the detection device, the rotor drives the sliding block to rotate, the sliding block is in contact with the shell in the rotating process, the sliding block is driven to move under the action of the shell, the sliding block drives the rotating ring to rotate, the rotating ring drives the driving rod to rotate, and the driving rod drives the driven rod to rotate in the rotating process. The driven rod drives the rotating block to rotate in the rotating process, the function of automatically detecting the position of the rotor is achieved, and the production efficiency and stability of equipment are improved.

Description

technical field [0001] The invention relates to the technical field of manufacturing electronic components, in particular to a detection device used for a vacuum sputtering instrument to prevent the rotor of a vacuum pump from dislocation. Background technique [0002] The high-end equipment manufacturing industry refers to the industry that produces advanced industrial facilities and equipment with high technology and high added value. High-end equipment mainly includes high-tech and high-value-added equipment required for the transformation and upgrading of traditional industries and the development of strategic emerging industries. The high-end equipment manufacturing industry is a strategic emerging industry led by high-tech, at the high end of the value chain and the core link of the industrial chain, which determines the comprehensive competitiveness of the entire industrial chain. It is the backbone of the modern industrial system and the engine to promote industrial ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04C28/28F04C25/02F04C29/00
CPCF04C28/28F04C25/02F04C29/00F04C2240/20F04C2270/86
Inventor 王洪义
Owner 王洪义
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