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Automatic calibration device and method for laser displacement sensor

A laser displacement and calibration device technology, applied in the field of precision measurement and sensing, can solve problems such as laser beam shape analysis, limited production efficiency, etc., achieve high-precision calibration, have versatility and practicability, and ensure calibration accuracy Effect

Pending Publication Date: 2021-11-05
苏州创视智能技术有限公司
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AI Technical Summary

Problems solved by technology

The current calibration equipment can only complete the linear calibration function at a time, so the production efficiency is limited and the shape of the laser beam cannot be analyzed

Method used

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  • Automatic calibration device and method for laser displacement sensor
  • Automatic calibration device and method for laser displacement sensor
  • Automatic calibration device and method for laser displacement sensor

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Embodiment Construction

[0027] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0028] Such as figure 1 and figure 2 As shown, a laser displacement sensor automatic calibration device includes a horizontal base 1, on which a laser displacement sensor mounting base 2, a motion base 17 and a laser interferometer mounting base 15 are sequentially connected along the length direction of the horizontal base 1 , the laser displacement sensor mount 2 is equipped with a laser displacement sensor 3, the laser interferometer mount 15 is connected with a laser interferometer 13 through a laser interferometer adjustment frame 14, and the moving pedestal 17 is slidably connected with a A moving table 16, the moving table 16 is provided with a beam analyzer 8, and a measured object mounting bracket 7 and a square mirror mounting plate 9 respectively positioned at both sides of the beam analyzer 8, and the measured object mo...

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Abstract

The invention relates to an automatic calibration device and method for a laser displacement sensor. A laser displacement sensor and a laser interferometer are arranged on the two sides of a moving table top respectively, a light beam analyzer is arranged on the moving table top to achieve light spot measurement, and during calibration, a standard measured object is controlled to move in a stepping mode from the near end of a measuring range to the far end of the measuring range; laser displacement sensor data, laser interferometer data and light beam analyzer data at each sampling position are recorded, after full-scale scanning is completed, linear deviation is calculated according to laser displacement sensor readings and laser interferometer readings at different positions, and a calibration table is generated for calibration; and the shape and direction of the measurement light beam are fitted according to the section light spot data at different positions so as to adjust parameters such as focus and direction. The device can realize simultaneous measurement of linear deviation of the laser displacement sensor and single scanning of a light beam shape, is suitable for calibration of laser displacement sensors with various measuring ranges, and can remarkably improve calibration precision and production efficiency.

Description

technical field [0001] The invention relates to the technical field of precision measurement and sensing, in particular to an automatic calibration device and method for a laser displacement sensor. Background technique [0002] Laser displacement sensors are widely used in distance measurement, vibration measurement, shape measurement, etc. in the field of industrial automation. Typical applications include dispensing machine positioning, spindle runout measurement, workpiece size measurement, geometric surface measurement, etc. The laser displacement sensor has the excellent characteristics of high speed, high precision, and non-contact. In order to ensure the good measurement accuracy of the laser displacement sensor, its linearity and beam distribution must be calibrated and verified. The laser displacement sensor obtains the light point information on the surface of the measured object through the linear array CMOS sensor, and the nonlinear comprehensive effect of the i...

Claims

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Application Information

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IPC IPC(8): G01S7/497
CPCG01S7/497
Inventor 刘钧居冰峰张文浩戴霖陈旺
Owner 苏州创视智能技术有限公司
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