High-speed Tracking Method for Micro-Nano Structure Pattern Sample

Abstract

A high-speed tracking method for micro-nano-structure graphic samples, including a computer, an illumination imaging module, a dichroic prism, a focusing mechanism, piezoelectric ceramics, an objective lens, a micro-nano-structure graphic sample to be tracked, a workpiece table, a detector, an image Diffusion module, beam splitter module, beam expander, laser and controller. The micro-nano structure pattern sample to be tracked is placed on the workpiece table, and the surface of the micro-nano structure pattern sample to be tracked is clearly imaged in the illumination imaging module by moving the focusing mechanism up and down. Adjust the beam expander so that the laser emitted by the laser is focused on the surface of the micro-nano structure pattern sample to be tracked, and the workpiece table and the controller are synchronously controlled to complete the movement and tracking of the micro-nano structure pattern sample to be tracked. The high-speed tracking method of the micro-nano structure pattern sample of the present invention can automatically track the micro-nano structure pattern sample at high speed, high precision and high sensitivity, so as to ensure clear imaging of the micro-nano structure pattern and provide guarantee for subsequent reading and detection.

Description

technical field [0001] The invention relates to the field of high-speed tracking of micro-nano structure pattern samples, and is a novel tracking control method based on astigmatic defocus detection, which can be used for high-speed tracking of micro-nano structure pattern samples during imaging. Background technique [0002] Whether the optical device with micro-nano structure can meet the design parameters is mainly affected by the micro-nano structure, so the detection of micro-nano structure pattern sample imaging is very important. When historical documents such as ancient books and paintings, classical masterpieces, and archives are preserved at the micro-nano level, whether they can quickly read such micro-nano-level images and text information determines the efficiency of this preservation method. However, when detecting or reading micro-nano-level structures, it is necessary to use high-magnification objective lenses, which have small field of view and depth of fiel...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to overcome the unstable problem of the existing astigmatism automatic tracking technology when tracking the micro-nano structure graphics, and judge whether the current position is in the graphics area or the non-graphics area before real-time tracking

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