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Rotor structure with long-acting operation

A rotor structure, long-term technology, applied to components of pumping devices for elastic fluids, non-variable pumps, axial flow pumps, etc., can solve problems such as easy accumulation of dust particles, fragmentation, and short maintenance periods

Pending Publication Date: 2021-07-30
HIGHLIGHT TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the chamber of the turbomolecular vacuum pump, there is still a small amount of space, such as a stepped section, which is particularly easy to accumulate dust particles.
Therefore, traditional semiconductor and other manufacturing processes often need to be shut down to remove deposits. Otherwise, the rotor blades are likely to shake when rotating at high speed due to contact with deposits, and then hit other blades and cause fragmentation. Therefore, the traditional maintenance cycle is quite short.

Method used

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  • Rotor structure with long-acting operation
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  • Rotor structure with long-acting operation

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Embodiment Construction

[0044] In order to facilitate the understanding of the technical features, content and advantages of the present invention and the effects that can be achieved, the present invention is hereby combined with the drawings and described in detail as follows in the form of embodiments, and the purposes of the drawings used therein are only For the purpose of illustrating and assisting the description, it may not be the true proportion and precise configuration of the present invention after implementation, so the scale and configuration relationship of the attached drawings should not be interpreted to limit the scope of rights of the present invention in actual implementation. In addition, for ease of understanding, the same components in the following embodiments are described with the same symbols.

[0045] In addition, the terms used in the entire specification and claims, unless otherwise specified, generally have the ordinary meaning that each term is used in this field, in t...

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Abstract

The invention relates to a rotor structure with long-acting operation. The rotor structure comprises a rotor body and a plurality of rotor blades, the plurality of rotor blades are annularly arranged on the outer side of the rotor body and longitudinally distributed to form a plurality of rotor blade layers, the rotor blade layers comprise at least one first rotor blade layer and a plurality of second rotor blade layers, the trailing ends of the first rotor blade layers are separated from the side wall of an accommodating chamber of a turbo-molecular vacuum pump by a first transverse distance, the trailing ends of the second rotor blade layers are separated from the side wall of an accommodating chamber by a second transverse distance, and the first transverse distance is substantially larger than the second transverse distance, so that under the condition that the air exhaust efficiency is maintained, the rotor blades are prevented from rubbing and touching sediments on the step section of the accommodating chamber to shake in the rotating process, so that the rotor blades can be effectively prevented from being broken due to collision with other blades, the maintenance frequency is further reduced, and the purpose of long-acting operation is achieved.

Description

technical field [0001] The present invention relates to a rotor structure, in particular to a long-term operating rotor structure. Background technique [0002] In recent years, due to the vigorous development of the semiconductor industry, the demand for related equipment in the semiconductor front-end process has increased significantly. Among them, the heart component of the high vacuum system—the turbomolecular vacuum pump has become a high vacuum system component with great demand. The current turbomolecular vacuum pump can drive the rotor connected to it for vacuum pumping process. The gas molecules are driven by the rotor blades and enter the stator blades of the next layer, and the gas molecules are turned after hitting the stator blades. Then you can enter the rotor blade of the next layer. The working principle of the turbomolecular vacuum pump is to use the high-speed rotating inclined blades to make the gas molecules in the system move towards the outlet, and us...

Claims

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Application Information

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IPC IPC(8): F04D19/04F04D29/32F04D29/38
CPCF04D19/042F04D29/32F04D29/38
Inventor 孙世源方志强陈建勋
Owner HIGHLIGHT TECH
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